| Citation: |
Ye Chao, Chen Xianxiang, Peng Chunrong, Tao Hu, Xia Shanhong. Application of Two Thermal Actuators in Miniature Electric Field Sensors[J]. Journal of Semiconductors, 2006, In Press.
Ye C, Chen X X, Peng C R, Tao H, Xia S H. Application of Two Thermal Actuators in Miniature Electric Field Sensors[J]. Chin. J. Semicond., 2006, 27(9): 1672.
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Application of Two Thermal Actuators in Miniature Electric Field Sensors
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Abstract
This paper presents two novel miniature electrostatic field sensors with thermal actuators,one of which uses a chevron actuator array and the other of which uses amplification-compliant micro-transmission.A test system with a lock-in amplifier is constructed to detect the output signal of the sensor.The test results show that both of the two sensors respond to an external electric field linearly,but the sensor with amplification-compliant micro-transmissions has higher sensitivity. -
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