Chin. J. Semicond. > 2003, Volume 24 > Issue 6 > 592-597
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一种采用局域注氧技术制备的新型DSOI器件(英文)

何平 , 江波 , 林曦 , 刘理天 , 田立林 , 李志坚 , 董业明 , 陈猛 and 王曦

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Key words: DSOI, 局域注氧技术, 自热效应, 热阻

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(6): 592-597
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      • Received Date: 2015-08-20

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