Chin. J. Semicond. > 2000, Volume 21 > Issue 10 > 993-998

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SIMOX薄膜材料的红外光谱特性和薄膜厚度的非破坏性测量方法

卢殿通 and P L F Hemment

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Key words: SIMOX薄膜, 红外光谱, 非破坏性测量

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    Received: 20 August 2015 Revised: Online: Published: 01 October 2000

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      • Received Date: 2015-08-20

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