Chin. J. Semicond. > 2005, Volume 26 > Issue 3 > 601-605
|

CONTENTS

优化的基于模型的光学邻近矫正算

蔡懿慈 , 王旸 , 周强 and 洪先龙

+ Author Affiliations

PDF

Abstract: 提出了一种新的优化的基于模型的光学邻近矫正算法，该算法充分考虑了图形内部及图形之间的光学邻近影响，实现了线段切割和移动步长的自适应性，提高了系统的矫正精度及矫正速度，实验结果表明该算法是有效的．

    • Search

    Advanced Search >>

    Article Metrics

    Article views: 2125 Times PDF downloads: 1038 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 March 2005

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2005  >  26(3): 601-605
      优化的基于模型的光学邻近矫正算[J]. Journal of Semiconductors, 2005, In Press. 优化的基于模型的光学邻近矫正算[J]. Chin. J. Semicond., 2005, 26(3): 601.Export: BibTex EndNote
      Citation:
      优化的基于模型的光学邻近矫正算[J]. Journal of Semiconductors, 2005, In Press.

      优化的基于模型的光学邻近矫正算[J]. Chin. J. Semicond., 2005, 26(3): 601.
      Export: BibTex EndNote
      shu

      优化的基于模型的光学邻近矫正算

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return