J. Semicond. > 2008, Volume 29 > Issue 11 > 2148-2152

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Back-Gate Effect of SOI LDMOSFETs

Bi Jinshun, Song Limei, Hai Chaohe and Han Zhengsheng

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Abstract: 0.5μm-gate-length lateral double-diffused metal-oxide-semiconductor field-effect transistors (LDMOSFETs) with low barrier body contact (LBBC) and body tied to the source (BTS) were fabricated on silicon-on-insulator (SOI) substrates.The back-gate effects on front-channel subthreshold characteristics,on-resistance,and off-state breakdown characteristics of these devices are studied in detail.The LDMOSFETs with the LBBC structure show less back-gate effect than those with the BTS structure due to better control of the floating body effect and suppression of the parasitic back-channel leakage current.A model for the SOI LDMOSFETs has been given,including the front- and back-channel conductions as well as the bias-dependent series resistance.

Key words: SOILDMOSFETback-gate effect

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    Received: 18 August 2015 Revised: 29 June 2008 Online: Published: 01 November 2008

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      Bi Jinshun, Song Limei, Hai Chaohe, Han Zhengsheng. Back-Gate Effect of SOI LDMOSFETs[J]. Journal of Semiconductors, 2008, In Press. Bi J S, Song L M, Hai C H, Han Z S. Back-Gate Effect of SOI LDMOSFETs[J]. J. Semicond., 2008, 29(11): 2148.Export: BibTex EndNote
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      Bi Jinshun, Song Limei, Hai Chaohe, Han Zhengsheng. Back-Gate Effect of SOI LDMOSFETs[J]. Journal of Semiconductors, 2008, In Press.

      Bi J S, Song L M, Hai C H, Han Z S. Back-Gate Effect of SOI LDMOSFETs[J]. J. Semicond., 2008, 29(11): 2148.
      Export: BibTex EndNote

      Back-Gate Effect of SOI LDMOSFETs

      • Received Date: 2015-08-18
      • Accepted Date: 2008-03-25
      • Revised Date: 2008-06-29
      • Published Date: 2008-11-11

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