Chin. J. Semicond. > 2002, Volume 23 > Issue 10 > 1088-1092
|

CONTENTS

p型扩散区(SiO_2/Si系扩Ga)的俄歇分析

孙瑛 and 王凤英

+ Author Affiliations

PDF

Key words: SiO2层, 镓扩散, 重金属杂质, 俄歇分析

    • Search

    Advanced Search >>

    Article Metrics

    Article views: 2467 Times PDF downloads: 1273 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 October 2002

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2002  >  23(10): 1088-1092
      Export: BibTex EndNote
      Citation:


      Export: BibTex EndNote
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return