Chin. J. Semicond. > 2002, Volume 23 > Issue 10 > 1024-1030
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具有光纤自定位保持结构的2×2扭转微镜光开关阵列的制作和机电特性(英文)

吴文刚 , 郝一龙 , 栗大超 , 张培玉 and 武国英

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Key words: 微机电系统, 光开关, 扭转微镜, 光纤自定位保持结构, 混合微加工

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(10): 1024-1030
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      • Received Date: 2015-08-19

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