Chin. J. Semicond. > 2005, Volume 26 > Issue S1 > 102-105

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MgZnO Alloy Thin Films Grown by Metalorganic Chemical Vapor Deposition

Zhang Yuantao, Zhu Huichao, Cui Yongguo, Zhang Baolin, Yang Shuren and Du Guotong

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Abstract: High-quality MgxZn1-xO thin films are successfully grown on C-plane sapphire substrates by metalorganic chemical vapor deposition at 600~630℃.The structural and optical properties of MgxZn1-xO films are investigated using X-ray diffraction and the transmittance spectrum.The alloy thin films keep the wurtzite structure and MgO phase separation is not observed with Mg content up to 0.39.The optical bandgaps of MgxZn1-xO alloys (0≤x≤0.39) range from 3.3 to 3.95eV.

Key words: metalorganic chemical vapor depositionMgZnO alloy thin filmssemiconducting II-VI materials

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2005

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      Zhang Yuantao, Zhu Huichao, Cui Yongguo, Zhang Baolin, Yang Shuren, Du Guotong. MgZnO Alloy Thin Films Grown by Metalorganic Chemical Vapor Deposition[J]. Journal of Semiconductors, 2005, In Press. Zhang Y T, Zhu H C, Cui Y G, Zhang B L, Yang S R, Du G T. MgZnO Alloy Thin Films Grown by Metalorganic Chemical Vapor Deposition[J]. Chin. J. Semicond., 2005, 26(13): 102.Export: BibTex EndNote
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      Zhang Yuantao, Zhu Huichao, Cui Yongguo, Zhang Baolin, Yang Shuren, Du Guotong. MgZnO Alloy Thin Films Grown by Metalorganic Chemical Vapor Deposition[J]. Journal of Semiconductors, 2005, In Press.

      Zhang Y T, Zhu H C, Cui Y G, Zhang B L, Yang S R, Du G T. MgZnO Alloy Thin Films Grown by Metalorganic Chemical Vapor Deposition[J]. Chin. J. Semicond., 2005, 26(13): 102.
      Export: BibTex EndNote

      MgZnO Alloy Thin Films Grown by Metalorganic Chemical Vapor Deposition

      • Received Date: 2015-08-19

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