Chin. J. Semicond. > 2003, Volume 24 > Issue 8 > 877-881
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电容式微传声器的性能模拟与优化设计

宁瑾 and 刘忠立

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Key words: 电容式微传声器, MEMS, 有限元分析, 性能模拟

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    Received: 20 August 2015 Revised: Online: Published: 01 August 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(8): 877-881
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      • Received Date: 2015-08-20

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