| Citation: |
Sun Longjie, Yang Bo, Guo Lihui. Design of Silicon Spiral Inductors Used for 5～6GHz Wireless LAN[J]. Journal of Semiconductors, 2006, In Press.
Sun L J, Yang B, Guo L H. Design of Silicon Spiral Inductors Used for 5～6GHz Wireless LAN[J]. Chin. J. Semicond., 2006, 27(5): 892.
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Design of Silicon Spiral Inductors Used for 5～6GHz Wireless LAN
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Abstract
A method for designing and optimizing the construction of inductor layout is presented.A set of 5.7GHz inductors with low resistivity silicon substrate is designed with 0.18μm Cu/SiO2 interconnect process technology.The layout structures such as the inner core size,coil-width,and coil-space of the inductors (0.2～11nH) are optimized.Compared to general methods,this method improves the Q of the 5.7GHz inductors to 5～8.-
Keywords:
- RF inductor,
- structure optimization,
- simulation,
- WLAN
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References
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