Chin. J. Semicond. > 2003, Volume 24 > Issue 11 > 1222-1225

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Key words: 阵列波导光栅(AWG), SiO2, 感应耦合等离子体刻蚀(ICP)

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    Received: 20 August 2015 Revised: Online: Published: 01 November 2003

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      • Received Date: 2015-08-20

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