Chin. J. Semicond. > 2001, Volume 22 > Issue 11 > 1474-1480

CONTENTS

一种新的等离子体边缘损伤的测量方法

朱志炜 , 郝跃 and 张进城

+ Author Affiliations

PDF

Key words: 边缘损伤, 天线比, 电荷泵

    • Search

    Advanced Search >>

    Article Metrics

    Article views: 2263 Times PDF downloads: 890 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 November 2001

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2001  >  22(11): 1474-1480
      Export: BibTex EndNote
      Citation:


      Export: BibTex EndNote
      shu

      • Received Date: 2015-08-20

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return