Chin. J. Semicond. > 2006, Volume 27 > Issue 5 > 886-891

PAPERS

Breakdown Voltage Analysis for a Double Step Buried Oxide SOI Structure

Duan Baoxing, Zhang Bo and Li Zhaoji

+ Author Affiliations

PDF

Abstract: A novel structure with a double step buried oxide SOI (D-SBOSOI) is developed on the basis of single step buried oxide structure.The relation of three times the vertical electric field between the silicon and buried oxide in conventional structure has been broken due to charge accumulation on the step buried oxide in D-SBOSOI,resulting in an electric field of 200V/μm in the buried oxide.Furthermore,the surface electric field in this structure reaches nearly ideal uniform distribution due to the additive electric field modulation by double step buried oxide.The results show that the breakdown voltage is increased because the vertical and lateral fields are optimized in this structure by virtue of 2D MEDICI simulation.

Key words: double step buried oxide SOIcharges accumulationsurface electric fieldbreakdown voltage

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 3166 Times PDF downloads: 2306 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 May 2006

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Duan Baoxing, Zhang Bo, Li Zhaoji. Breakdown Voltage Analysis for a Double Step Buried Oxide SOI Structure[J]. Journal of Semiconductors, 2006, In Press. Duan B X, Zhang B, Li Z J. Breakdown Voltage Analysis for a Double Step Buried Oxide SOI Structure[J]. Chin. J. Semicond., 2006, 27(5): 886.Export: BibTex EndNote
      Citation:
      Duan Baoxing, Zhang Bo, Li Zhaoji. Breakdown Voltage Analysis for a Double Step Buried Oxide SOI Structure[J]. Journal of Semiconductors, 2006, In Press.

      Duan B X, Zhang B, Li Z J. Breakdown Voltage Analysis for a Double Step Buried Oxide SOI Structure[J]. Chin. J. Semicond., 2006, 27(5): 886.
      Export: BibTex EndNote

      Breakdown Voltage Analysis for a Double Step Buried Oxide SOI Structure

      • Received Date: 2015-08-20

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return