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Extraction of Equivalent Oxide Thickness for HfO2 High k Gate Dielectrics

Chen Yong, Zhao Jianming, Han Dedong, Kang Jinfeng and Han Ruqi

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Abstract: The equivalent oxide thickness (EOT) of an HfO2 high kdielectric is extracted in two steps.First,a dual-frequency technique is employed for the C-V curve to overcome the effects of leakage current and substrate resistance.Second,an approach using flat-band capacitance is demonstrated for extracting the EOT of a high kdielectric,without the effects of inversion or accumulation capacitance.The relative error between the EOT extracted by this two-step approach and by the quantum corrected Poisson equation is less than 5%,thus validating the approach.

Key words: high-kdielectricequivalent oxide thicknessHfO2

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    Received: 20 August 2015 Revised: Online: Published: 01 May 2006

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      Chen Yong, Zhao Jianming, Han Dedong, Kang Jinfeng, Han Ruqi. Extraction of Equivalent Oxide Thickness for HfO2 High k Gate Dielectrics[J]. Journal of Semiconductors, 2006, In Press. Chen Y, Zhao J M, Han D D, Kang J F, Han R Q. Extraction of Equivalent Oxide Thickness for HfO2 High k Gate Dielectrics[J]. Chin. J. Semicond., 2006, 27(5): 852.Export: BibTex EndNote
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      Chen Yong, Zhao Jianming, Han Dedong, Kang Jinfeng, Han Ruqi. Extraction of Equivalent Oxide Thickness for HfO2 High k Gate Dielectrics[J]. Journal of Semiconductors, 2006, In Press.

      Chen Y, Zhao J M, Han D D, Kang J F, Han R Q. Extraction of Equivalent Oxide Thickness for HfO2 High k Gate Dielectrics[J]. Chin. J. Semicond., 2006, 27(5): 852.
      Export: BibTex EndNote

      Extraction of Equivalent Oxide Thickness for HfO2 High k Gate Dielectrics

      • Received Date: 2015-08-20

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