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Influence of Ag Layer Thickness on the Properties of ZnO/Ag/ZnO Films

Li Jun, Yan Jinliang, Sun Xueqing, Li Kewei and Yang Chunxiu

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Abstract: ZnO(60nm)/Ag/ZnO(60nm) multilayer films with different Ag thicknesses were prepared by alternate RF magnetron sputtering of ZnO and DC magnetron sputtering of Ag.The structural,optical,and electrical properties of samples were studied with an X-ray diffractometer,a UV-vis spectrophotometer,and a four-point probe,respectively.The results indicate that increasing the thickness of the Ag layer enhances the polycrystalline structure of the ZnO(60nm)/Ag/ZnO(60nm) and the intensity of the Ag (111) peak.When the thickness of the Ag film is 11nm,the ZnO(60nm)/Ag/ZnO(60nm) film has a high optical transmittance of 92.3% at 554nm.As the thickness of the Ag film increases,red shift and broadening effects of the characteristic absorption peak of Ag occur,and the sheet resistance of the multilayer film decreases and then levels off to a steady value.

Key words: magnetron sputteringmultilayer filmsstructureoptical and electrical properties

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    Received: 18 August 2015 Revised: 06 March 2007 Online: Published: 01 September 2007

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      Li Jun, Yan Jinliang, Sun Xueqing, Li Kewei, Yang Chunxiu. Influence of Ag Layer Thickness on the Properties of ZnO/Ag/ZnO Films[J]. Journal of Semiconductors, 2007, In Press. Li J, Yan J L, Sun X Q, Li K W, Yang C X. Influence of Ag Layer Thickness on the Properties of ZnO/Ag/ZnO Films[J]. Chin. J. Semicond., 2007, 28(9): 1402.Export: BibTex EndNote
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      Li Jun, Yan Jinliang, Sun Xueqing, Li Kewei, Yang Chunxiu. Influence of Ag Layer Thickness on the Properties of ZnO/Ag/ZnO Films[J]. Journal of Semiconductors, 2007, In Press.

      Li J, Yan J L, Sun X Q, Li K W, Yang C X. Influence of Ag Layer Thickness on the Properties of ZnO/Ag/ZnO Films[J]. Chin. J. Semicond., 2007, 28(9): 1402.
      Export: BibTex EndNote

      Influence of Ag Layer Thickness on the Properties of ZnO/Ag/ZnO Films

      • Received Date: 2015-08-18
      • Accepted Date: 2007-03-06
      • Revised Date: 2007-03-06
      • Published Date: 2007-08-31

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