Chin. J. Semicond. > 2006, Volume 27 > Issue 7 > 1230-1235

PAPERS

Influence of Doping Level on the Gauge Factor of Polysilicon Nano-Film

Chuai Rongyan, Liu Xiaowei, Huo Mingxue, Song Minghao, Wang Xilian and Pan Huiyan

+ Author Affiliations

PDF

Abstract: For the purpose of aiding the development of effective MEMS strain sensors using polysilicon nano-film,we investigate the relationship between the B-doped concentration and the gauge factor of LPCVD-grown polysilicon nano-film and analyze the structure of the film via scanning electron photomicrographs and X-ray diffraction-spectra.Experiments show that under a heavy doping condition,the gauge factor of the nano-film is significantly larger than that of monocrystalline silicon with the same doping level,and when the doping concentration is around 2.5E20cm-3,the gauge factor of the film increases with the increase of the doping concentration.These results are explained by the tunneling effect.A modified model of piezoresistive properties for polysilicon is then presented constructively.

Key words: polysiliconnano-filmpiezoresistive propertytunnel effectgauge factor

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 3232 Times PDF downloads: 2231 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 July 2006

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Chuai Rongyan, Liu Xiaowei, Huo Mingxue, Song Minghao, Wang Xilian, Pan Huiyan. Influence of Doping Level on the Gauge Factor of Polysilicon Nano-Film[J]. Journal of Semiconductors, 2006, In Press. Chuai R Y, Liu X W, Huo M X, Song M H, Wang X L, Pan H Y. Influence of Doping Level on the Gauge Factor of Polysilicon Nano-Film[J]. Chin. J. Semicond., 2006, 27(7): 1230.Export: BibTex EndNote
      Citation:
      Chuai Rongyan, Liu Xiaowei, Huo Mingxue, Song Minghao, Wang Xilian, Pan Huiyan. Influence of Doping Level on the Gauge Factor of Polysilicon Nano-Film[J]. Journal of Semiconductors, 2006, In Press.

      Chuai R Y, Liu X W, Huo M X, Song M H, Wang X L, Pan H Y. Influence of Doping Level on the Gauge Factor of Polysilicon Nano-Film[J]. Chin. J. Semicond., 2006, 27(7): 1230.
      Export: BibTex EndNote

      Influence of Doping Level on the Gauge Factor of Polysilicon Nano-Film

      • Received Date: 2015-08-20

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return