| Citation: |
Yang Chen, Liu Feng, Ren Tianling, Liu Litian, Feng Haigang, Wang Zihui, Long Haibo, Yu Jun. A RF Integrated Inductor with CoZrO Ferrite Thin Film[J]. Journal of Semiconductors, 2005, In Press.
Yang C, Liu F, Ren T L, Liu L T, Feng H G, Wang Z H, Long H B, Yu J. A RF Integrated Inductor with CoZrO Ferrite Thin Film[J]. Chin. J. Semicond., 2005, 26(11): 2208.
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A RF Integrated Inductor with CoZrO Ferrite Thin Film
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Abstract
A novel RF integrated inductor with ferrite thin-film is fabricated.The inductor has a simple structure of "SiO2 insulating layer/magnetic thin-film (CoZrO) /SiO2 insulating layer/Cu coils" ,in which a planar single-turn metal coil and a CoZrO ferrite thin-film fabricated by the Sol-Gel method are used.The fabrication process is compatible with standard integrated process.Inductors without the magnetic thin-film are fabricated as the referential sample using the same processes,in which the structure parameters are consistent with the inductor with magnetic thin-film.The inductance (L) of the inductor with magnetic thin-film is 175nH and the quality factor (Q) is 18.5 at 2GHz.Compared with the inductor without magnetic thin-film,L and Q are raised by 25% and 23%,respectively.-
Keywords:
- CoZrO ferrite,
- magnetic thin-film,
- RF integration
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