Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1369-1373
|

CONTENTS

电容式绝对压力传感器的改进模型及温度特性分析

刘娜 , 黄庆安 , 秦明 and 周闵新

+ Author Affiliations

PDF

Key words: 电容式绝对压力传感器, 改进模型, 残余气体, 温度漂移, 灵敏度

    • Search

    Advanced Search >>

    Article Metrics

    Article views: 2290 Times PDF downloads: 2173 Times Cited by: 0 Times

    History

    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1369-1373
      Export: BibTex EndNote
      Citation:


      Export: BibTex EndNote
      shu

      • Received Date: 2015-08-18

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return