SEMICONDUCTOR TECHNOLOGY

Design and fabrication of a planar patch-clamp substrate using a silicon-on-insulator wafer

Zhang Zhenlong, Liu Xiangyang and Mao Yanli

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Abstract: The planar patch-clamp technique has been applied to high throughput screening in drug discovery. The key feature of this technique is the fabrication of a planar patch-clamp substrate using appropriate materials. In this study, a planar patch-clamp substrate was designed and fabricated using a silicon-on-insulator (SOI) wafer. The access resistance and capacitance of SOI-based planar patch-clamp substrates are smaller than those of bulk silicon-based planar substrates, which will reduce the distributed RC noise.

Key words: planar patch-clamp substrate silicon-on-insulator access resistance capacitance

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    Received: 18 August 2015 Revised: 01 April 2009 Online: Published: 01 September 2009

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      Zhang Zhenlong, Liu Xiangyang, Mao Yanli. Design and fabrication of a planar patch-clamp substrate using a silicon-on-insulator wafer[J]. Journal of Semiconductors, 2009, 30(9): 096001. doi: 10.1088/1674-4926/30/9/096001 Zhang Z L, Liu X Y, Mao Y L. Design and fabrication of a planar patch-clamp substrate using a silicon-on-insulator wafer[J]. J. Semicond., 2009, 30(9): 096001. doi: 10.1088/1674-4926/30/9/096001.Export: BibTex EndNote
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      Zhang Zhenlong, Liu Xiangyang, Mao Yanli. Design and fabrication of a planar patch-clamp substrate using a silicon-on-insulator wafer[J]. Journal of Semiconductors, 2009, 30(9): 096001. doi: 10.1088/1674-4926/30/9/096001

      Zhang Z L, Liu X Y, Mao Y L. Design and fabrication of a planar patch-clamp substrate using a silicon-on-insulator wafer[J]. J. Semicond., 2009, 30(9): 096001. doi: 10.1088/1674-4926/30/9/096001.
      Export: BibTex EndNote

      Design and fabrication of a planar patch-clamp substrate using a silicon-on-insulator wafer

      doi: 10.1088/1674-4926/30/9/096001
      • Received Date: 2015-08-18
      • Accepted Date: 2009-03-01
      • Revised Date: 2009-04-01
      • Published Date: 2009-08-28

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