SEMICONDUCTOR TECHNOLOGY

Dummy fill effect on CMP planarity

Zhou Junxiong, Chen Lan, Ruan Wenbiao, Li Zhigang, Shen Weixiang and Ye Tianchun

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Abstract: With the use of a chemical-mechanical polishing (CMP) simulator verified by testing data from a foundry, the effect of dummy fill characteristics, such as fill size, fill density and fill shape, on CMP planarity is analyzed. The results indicate that dummy density has a significant impact on oxide erosion, and copper dishing is in proportion to dummy size. We also demonstrate that cross shape dummy fill can have the best dishing performance at the same density.

Key words: chemical mechanical polishing

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    Received: 18 August 2015 Revised: 03 June 2010 Online: Published: 01 October 2010

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      Zhou Junxiong, Chen Lan, Ruan Wenbiao, Li Zhigang, Shen Weixiang, Ye Tianchun. Dummy fill effect on CMP planarity[J]. Journal of Semiconductors, 2010, 31(10): 106003. doi: 10.1088/1674-4926/31/10/106003 Zhou J X, Chen L, Ruan W B, Li Z G, Shen W X, Ye T C. Dummy fill effect on CMP planarity[J]. J. Semicond., 2010, 31(10): 106003. doi: 10.1088/1674-4926/31/10/106003.Export: BibTex EndNote
      Citation:
      Zhou Junxiong, Chen Lan, Ruan Wenbiao, Li Zhigang, Shen Weixiang, Ye Tianchun. Dummy fill effect on CMP planarity[J]. Journal of Semiconductors, 2010, 31(10): 106003. doi: 10.1088/1674-4926/31/10/106003

      Zhou J X, Chen L, Ruan W B, Li Z G, Shen W X, Ye T C. Dummy fill effect on CMP planarity[J]. J. Semicond., 2010, 31(10): 106003. doi: 10.1088/1674-4926/31/10/106003.
      Export: BibTex EndNote

      Dummy fill effect on CMP planarity

      doi: 10.1088/1674-4926/31/10/106003
      • Received Date: 2015-08-18
      • Accepted Date: 2010-04-21
      • Revised Date: 2010-06-03
      • Published Date: 2010-10-05

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