Abstract: This paper presents a systematic multivariate process capability index (MPCI) method, which may provide references for assuring and improving process quality levels while achieving an overall evaluation of process quality. The system method includes a spatial MPCI model for multivariate normal distribution data, MPCI model based on factor weight for multivariate no-normal distribution application, and MPCI model based on yield for yield application. At last, examples for calculating MPCI are given, and the experimental results show that this systematic method is effective and practical.

Key words: microelectronics process, multivariate, process capability index, yield, factor weight