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A novel double-trench LVTSCR used in the ESD protection of a RFIC

Li Li and Liu Hongxia

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Abstract: A low-voltage triggering silicon-controlled rectifier (LVTSCR), for its high efficiency and low parasitic parameters, has many advantages in ESD protection, especially in ultra-deep sub-micron (UDSM) IC and high frequency applications. In this paper, the impact factors of the snapback characteristics of a LVTSCR and the configuring modes are analyzed and evaluated in detail. These parameters include anode series resistance, gate voltage, structure and size of devices. In addition, a double-trench LVTSCR is presented that can increase the hold-on voltage effectively and offers easy adjustment. Also, its snapback characteristics can obey the ESD design window rule very well. The strategy of ESD protection in a RFIC using a LVTSCR is discussed at the end of the paper.

Key words: UDSM LVTSCR RFIC ESD design window

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    Received: 20 August 2015 Revised: 19 May 2011 Online: Published: 01 October 2011

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      Li Li, Liu Hongxia. A novel double-trench LVTSCR used in the ESD protection of a RFIC[J]. Journal of Semiconductors, 2011, 32(10): 104005. doi: 10.1088/1674-4926/32/10/104005 Li L, Liu H X. A novel double-trench LVTSCR used in the ESD protection of a RFIC[J]. J. Semicond., 2011, 32(10): 104005. doi: 10.1088/1674-4926/32/10/104005.Export: BibTex EndNote
      Citation:
      Li Li, Liu Hongxia. A novel double-trench LVTSCR used in the ESD protection of a RFIC[J]. Journal of Semiconductors, 2011, 32(10): 104005. doi: 10.1088/1674-4926/32/10/104005

      Li L, Liu H X. A novel double-trench LVTSCR used in the ESD protection of a RFIC[J]. J. Semicond., 2011, 32(10): 104005. doi: 10.1088/1674-4926/32/10/104005.
      Export: BibTex EndNote

      A novel double-trench LVTSCR used in the ESD protection of a RFIC

      doi: 10.1088/1674-4926/32/10/104005
      Funds:

      National Natural Science Foundation of China

      • Received Date: 2015-08-20
      • Accepted Date: 2011-04-08
      • Revised Date: 2011-05-19
      • Published Date: 2011-09-20

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