| Citation: |
Yin Wen, Lu Quanyong, Liu Wanfeng, Zhang Jinchuan, Wang Lijun, Liu Junqi, Li Lu, Liu Fengqi, Wang Zhanguo. Porous waveguide facilitated low divergence quantum cascade laser[J]. Journal of Semiconductors, 2011, 32(6): 064008. doi: 10.1088/1674-4926/32/6/064008
Yin W, Lu Q Y, Liu W F, Zhang J C, Wang L J, Liu J Q, Li L, Liu F Q, Wang Z G. Porous waveguide facilitated low divergence quantum cascade laser[J]. J. Semicond., 2011, 32(6): 064008. doi: 10.1088/1674-4926/32/6/064008.
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Porous waveguide facilitated low divergence quantum cascade laser
doi: 10.1088/1674-4926/32/6/064008
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Abstract
A quantum cascade laser with a porous waveguide structure emitting at 4.5 μm is reported. A branch-like porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process. In contrast to the common ridge waveguide laser, devices with a porous structure give rather better beam quality. Utilizing this porous structure as a high-order mode absorber, the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9o.-
Keywords:
- quantum cascade laser
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