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Holding-voltage drift of a silicon-controlled rectifier with different film thicknesses in silicon-on-insulator technology

Jiang Yibo, Zeng Chuanbin, Du Huan, Luo Jiajun and Han Zhengsheng

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Abstract: This paper presents a new phenomenon, where the holding-voltage of a silicon-controlled rectifier acts as an electrostatic-discharge protection drift in diverse film thicknesses in silicon-on-insulator (SOI) technology. The phenomenon was demonstrated through fabricated chips in 0.18 μm SOI technology. The drift of the holding voltage was then simulated, and its mechanism is discussed comprehensively through ISE TCAD simulations.

Key words: holding-voltage drift

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    Received: 20 August 2015 Revised: 19 September 2011 Online: Published: 01 March 2012

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      Jiang Yibo, Zeng Chuanbin, Du Huan, Luo Jiajun, Han Zhengsheng. Holding-voltage drift of a silicon-controlled rectifier with different film thicknesses in silicon-on-insulator technology[J]. Journal of Semiconductors, 2012, 33(3): 034006. doi: 10.1088/1674-4926/33/3/034006 Jiang Y B, Zeng C B, Du H, Luo J J, Han Z S. Holding-voltage drift of a silicon-controlled rectifier with different film thicknesses in silicon-on-insulator technology[J]. J. Semicond., 2012, 33(3): 034006. doi: 10.1088/1674-4926/33/3/034006.Export: BibTex EndNote
      Citation:
      Jiang Yibo, Zeng Chuanbin, Du Huan, Luo Jiajun, Han Zhengsheng. Holding-voltage drift of a silicon-controlled rectifier with different film thicknesses in silicon-on-insulator technology[J]. Journal of Semiconductors, 2012, 33(3): 034006. doi: 10.1088/1674-4926/33/3/034006

      Jiang Y B, Zeng C B, Du H, Luo J J, Han Z S. Holding-voltage drift of a silicon-controlled rectifier with different film thicknesses in silicon-on-insulator technology[J]. J. Semicond., 2012, 33(3): 034006. doi: 10.1088/1674-4926/33/3/034006.
      Export: BibTex EndNote

      Holding-voltage drift of a silicon-controlled rectifier with different film thicknesses in silicon-on-insulator technology

      doi: 10.1088/1674-4926/33/3/034006
      Funds:

      The National Natural Science Foundation of China (General Program, Key Program, Major Research Plan)

      • Received Date: 2015-08-20
      • Accepted Date: 2011-09-19
      • Revised Date: 2011-09-19
      • Published Date: 2012-02-20

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