SEMICONDUCTOR MATERIALS

Effect of substrate temperature on the stability of transparent conducting cobalt doped ZnO thin films

Said Benramache, Boubaker Benhaoua and Foued Chabane

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Abstract: Transparent conducting Co doped ZnO thin films have been fabricated by Ultrasonic spray. The thin films were deposited at three different substrate temperatures of 300, 350 and 400 ℃. The obtained films had a hexagonal wurtzite structure with a strong (002) preferred orientation. The maximum crystallite size value of the film deposited at 350 ℃ is 55.46 nm. Spectrophotometer (UV-vis) of a Co doped ZnO film deposited at 350 ℃ shows an average transmittance of about 90%. The band gap energy increased from 3.351 to 3.362 eV when the substrate temperature increased from 300 to 350 ℃. The electrical conductivity of the films deposited at 300, 350 and 400 ℃ were 7.424, 7.547 and 6.743 (Ω·cm)-1 respectively. The maximum activation energy value of the films at 350 ℃ was 1.28 eV, indicating that the films exhibit a n-type semiconducting nature.

Key words: ZnO:Co filmstransparent conducting filmsultrasonic spray depositionsubstrate temperatureband gap energy

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    Received: 03 December 2014 Revised: 09 May 2012 Online: Published: 01 September 2012

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      Said Benramache, Boubaker Benhaoua, Foued Chabane. Effect of substrate temperature on the stability of transparent conducting cobalt doped ZnO thin films[J]. Journal of Semiconductors, 2012, 33(9): 093001. doi: 10.1088/1674-4926/33/9/093001 S Benramache, B Benhaoua, F Chabane. Effect of substrate temperature on the stability of transparent conducting cobalt doped ZnO thin films[J]. J. Semicond., 2012, 33(9): 093001. doi:  10.1088/1674-4926/33/9/093001.Export: BibTex EndNote
      Citation:
      Said Benramache, Boubaker Benhaoua, Foued Chabane. Effect of substrate temperature on the stability of transparent conducting cobalt doped ZnO thin films[J]. Journal of Semiconductors, 2012, 33(9): 093001. doi: 10.1088/1674-4926/33/9/093001

      S Benramache, B Benhaoua, F Chabane. Effect of substrate temperature on the stability of transparent conducting cobalt doped ZnO thin films[J]. J. Semicond., 2012, 33(9): 093001. doi:  10.1088/1674-4926/33/9/093001.
      Export: BibTex EndNote

      Effect of substrate temperature on the stability of transparent conducting cobalt doped ZnO thin films

      doi: 10.1088/1674-4926/33/9/093001
      • Received Date: 2014-12-03
      • Accepted Date: 2012-02-10
      • Revised Date: 2012-05-09
      • Published Date: 2012-08-21

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