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A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS

Xiangyu Meng1, , Baoyong Chi1, Haikun Jia1, Lixue Kuang1, Wen Jia2 and Zhihua Wang1

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 Corresponding author: Meng Xiangyu, mengxy11@mails.tsinghua.edu.cn

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Abstract: A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS with a low-resistivity (10 Ω· cm) silicon substrate is presented. The wideband is achieved by reducing the Q factor and exciting the high-order radiation modes with size optimization. The antenna uses an on-chip top layer metal as the patch and a probe station as the ground plane. The on-chip ground plane is connected to the probe station using the inner connection structure of the probe station for better performance. The simulated S11 is less than -10 dB over 46-95 GHz, which is well matched with the measured results over the available 40-67 GHz frequency range from our measurement equipment. A maximum gain of -5.55 dBi with 4% radiation efficiency at a 60 GHz point is also achieved based on Ansoft HFSS simulation. Compared with the current state-of-the-art devices, the presented antenna achieves a wider bandwidth and could be used in wideband millimeter-wave communication and image applications.

Key words: on-chip antennapatch antennawideband antennamillimeter-wave



[1]
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[2]
Milligan T A. Modern antenna design. 2nd ed. John Wiley & Sons, Inc, 2005
[3]
Hsu S S, Wei K C, Hsu C Y, et al. A 60-GHz millimeter-wave CPW-fed yagi antenna fabricated by using 0.18μm CMOS technology. IEEE Electron Device Lett, 2008, 29(6):625
[4]
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[5]
Lin C C, Hsu S S, Hsu C Y, et al. A 60-GHz millimeter-wave CMOS RFIC-on-chip triangular monopole antenna for WPAN applications. IEEE Antennas Propag Soc Int Symp, 2007:2522 http://ieeexplore.ieee.org/document/4396047/
[6]
Huang K K, Wentzloff D D. 60 GHz on-chip patch antenna integrated in a 0.13-μm CMOS technology. Ultra-Wideband (ICUWB), 2010:1
[7]
Han R, Zhang Y, Kim Y. 280 GHz and 860 GHz image sensors using Schottky-barrier diodes in 0.13μm digital CMOS. Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2012:254
Fig. 1.  Cross section of the 0.18 $\mu $m CMOS technology after the back grinding process.

Fig. 2.  Top view of the on-chip antenna structure.

Fig. 3.  The feed-line model.

Fig. 4.  The proposed interconnection scheme and the chip microphotograph.

Fig. 5.  Illustration of the HFSS port excitation and the interconnection of the on-chip antenna.

Fig. 6.  The simulated radiation pattern in a 3D polar plot.

Fig. 7.  The simulated 60 GHz radiation pattern in the (a) E-plane and (b) H-plane.

Fig. 8.  Simulated and measured $S_{11}$.

Table 1.   The parameters of the presented on-chip patch antenna.

Table 2.   Performance summary and comparison with the state-of-the-arts devices.

[1]
Carver K R, Mink J W. Microstrip antenna technology. IEEE Trans Antennas Propagation, 1981, 29(1):2 doi: 10.1109/TAP.1981.1142523
[2]
Milligan T A. Modern antenna design. 2nd ed. John Wiley & Sons, Inc, 2005
[3]
Hsu S S, Wei K C, Hsu C Y, et al. A 60-GHz millimeter-wave CPW-fed yagi antenna fabricated by using 0.18μm CMOS technology. IEEE Electron Device Lett, 2008, 29(6):625
[4]
Guo P J, Chuang H R. A 60-GHz millimeter-wave CMOS RFIC-on-chip meander-line planar inverted-f antenna for WPAN applications. Antennas and Propagation society International Symposium, 2008:1 http://ieeexplore.ieee.org/document/4619464/
[5]
Lin C C, Hsu S S, Hsu C Y, et al. A 60-GHz millimeter-wave CMOS RFIC-on-chip triangular monopole antenna for WPAN applications. IEEE Antennas Propag Soc Int Symp, 2007:2522 http://ieeexplore.ieee.org/document/4396047/
[6]
Huang K K, Wentzloff D D. 60 GHz on-chip patch antenna integrated in a 0.13-μm CMOS technology. Ultra-Wideband (ICUWB), 2010:1
[7]
Han R, Zhang Y, Kim Y. 280 GHz and 860 GHz image sensors using Schottky-barrier diodes in 0.13μm digital CMOS. Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2012:254
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    Received: 21 March 2013 Revised: 19 April 2013 Online: Published: 01 October 2013

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      Xiangyu Meng, Baoyong Chi, Haikun Jia, Lixue Kuang, Wen Jia, Zhihua Wang. A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS[J]. Journal of Semiconductors, 2013, 34(10): 105010. doi: 10.1088/1674-4926/34/10/105010 X Y Meng, B Y Chi, H K Jia, L X Kuang, W Jia, Z H Wang. A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS[J]. J. Semicond., 2013, 34(10): 105010. doi: 10.1088/1674-4926/34/10/105010.Export: BibTex EndNote
      Citation:
      Xiangyu Meng, Baoyong Chi, Haikun Jia, Lixue Kuang, Wen Jia, Zhihua Wang. A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS[J]. Journal of Semiconductors, 2013, 34(10): 105010. doi: 10.1088/1674-4926/34/10/105010

      X Y Meng, B Y Chi, H K Jia, L X Kuang, W Jia, Z H Wang. A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS[J]. J. Semicond., 2013, 34(10): 105010. doi: 10.1088/1674-4926/34/10/105010.
      Export: BibTex EndNote

      A wideband on-chip millimeter-wave patch antenna in 0.18 μm CMOS

      doi: 10.1088/1674-4926/34/10/105010
      Funds:

      the National Natural Science Foundation of China 61076029

      the National Natural Science Foundation of China 61222405

      the National Natural Science Foundation of China 61020106006

      the National Science and Technology Major Projects of China 2012ZX03004007

      the National Natural Science Foundation of China JCYJ20120616142625998

      Project supported by the National Science and Technology Major Projects of China (No. 2012ZX03004007) and the National Natural Science Foundation of China (Nos. 61020106006, 61076029, 61222405, JCYJ20120616142625998)

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