Fig. 1.
The structure of the sensor. (a) Whole structure. (b) Varistor distribution of the sensing structure.
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Deqin Lian, Changde He, Hui Zhang, Jiaqi Yu, Kejing Yuan, Chenyang Xue. The design and test of MEMS piezoresistive ultrasonic sensor arrays[J]. Journal of Semiconductors, 2013, 34(3): 034007. doi: 10.1088/1674-4926/34/3/034007
D Q Lian, C D He, H Zhang, J Q Yu, K J Yuan, C Y Xue. The design and test of MEMS piezoresistive ultrasonic sensor arrays[J]. J. Semicond., 2013, 34(3): 034007. doi: 10.1088/1674-4926/34/3/034007.
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The design and test of MEMS piezoresistive ultrasonic sensor arrays
doi: 10.1088/1674-4926/34/3/034007
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Abstract
The design, fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced. The consistency of the resonance frequency and the sensitivity of the array are tested. Moreover, we detect the directivity and the multi-target identification ability of the array. The results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical results. This paper analyzes this problem in detail and points out the direction of improvement. As for the directivity, the actual result is consistent with the theoretical one. The results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72° when the distance between the sensor array and measured objects is 2 m. -
References
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