Fig. 1.
Molecular structure of ${\text{(V}}{{\text{O}}_{_{\text{2}}}}{\text{(3 - fl))}}$
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Kh. S. Karimov, M. Saleem, M. Mahroof-Tahir, R. Akram, M.T. Saeed Chanee, A.K. Niaz. Resistive humidity sensor based on vanadium complex films[J]. Journal of Semiconductors, 2014, 35(9): 094001. doi: 10.1088/1674-4926/35/9/094001
Kh. S. Karimov, M. Saleem, M. Mahroof-Tahir, R. Akram, M. T. S. Chanee, A.K. Niaz. Resistive humidity sensor based on vanadium complex films[J]. J. Semicond., 2014, 35(9): 094001. doi: 10.1088/1674-4926/35/9/094001.
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Resistive humidity sensor based on vanadium complex films
doi: 10.1088/1674-4926/35/9/094001
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Abstract
A resistive-type relative humidity (RH) sensor based on vanadium complex (VO2(3-fl)) film is reported in this study. Gold electrodes were deposited on the glass substrates in a co-planar structure. A thin film of vanadium complex was coated as a humidity-sensing material on the top of the pre-patterned electrodes. The humidity-sensing principle of the sensor was based on the conductivity change of coated sensing element upon adsorption/desorption of water vapor. The resistance of the humidity sensor measured at 1 kHz decreased linearly with increasing the humidity in the range of 35%-70% RH. The overall resistance of the sensor decreases 11 times. An equivalent circuit for the VO2(3-fl) based resistive-type humidity sensor was developed. The properties of the sensor studied in this work make it beneficial for use in the instruments for environmental monitoring of humidity.-
Keywords:
- vanadium complex,
- thin film,
- humidity sensor,
- resistance
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References
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