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Application of the thermoelectric MEMS microwave power sensor in a powerradiation monitoring system

Bo Gao, Jing Yang, Si Jiang and Debo Wang

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 Corresponding author: Wang Debo, Email: wdb@njupt.edu.cn

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Abstract: A power radiation monitoring system based on thermoelectric MEMS microwave power sensors is studied. This monitoring system consists of three modules: a data acquisition module, a data processing and display module, and a data sharing module. It can detect the power radiation in the environment and the date information can be processed and shared. The measured results show that the thermoelectric MEMS microwave power sensor and the power radiation monitoring system both have a relatively good linearity. The sensitivity of the thermoelectric MEMS microwave power sensor is about 0.101 mV/mW, and the sensitivity of the monitoring system is about 0.038 V/mW. The voltage gain of the monitoring system is about 380 times, which is relatively consistent with the theoretical value. In addition, the low-frequency and low-power module in the monitoring system is adopted in order to reduce the electromagnetic pollution and the power consumption, and this work will extend the application of the thermoelectric MEMS microwave power sensor in more areas.

Key words: thermoelectricMEMSpower sensorpower radiationmonitoring system



[1]
Wang Suocheng, Hao Yongping, Liu Shuangjie. The design and analysis of a MEMS electrothermal actuator. Journal of Semiconductors, 2015, 36(4): 044012 doi: 10.1088/1674-4926/36/4/044012
[2]
Liu Xiong, Yao Yan, Ma Jiahao, et al. Micro packaged MEMS pressure sensor for intracranial pressure measurement. Journal of Semiconductors, 2015, 36(6): 064009 doi: 10.1088/1674-4926/36/6/064009
[3]
Liu Tong, Liao Xiaoping, Wang Debo. Sensitivity of MEMS microwave power sensor with the length of thermopile based on Fourier equivalent model. Journal of Semiconductors, 2011, 32(7): 074009 doi: 10.1088/1674-4926/32/7/074009
[4]
Su Shi, Liao Xiaoping. A capacitive membrane MEMS microwave power sensor in the X-band based on GaAs MMIC technology. Journal of Semiconductors, 2009, 30(5): 054004 doi: 10.1088/1674-4926/30/5/054004
[5]
Xu Yinglin, Liao Xiaoping. Design and fabrication of a terminating type MEMS microwave power sensor. Journal of Semiconductors, 2009, 30(4): 044010 doi: 10.1088/1674-4926/30/4/044010
[6]
Scott J B, Low T S, Cochran S et al. New thermocouple-based microwave/millimeter-wave power sensor MMIC techniques in GaAs. IEEE Trans Microw Theory Tech, 2011, 59(2): 338 doi: 10.1109/TMTT.2010.2087346
[7]
Dehe A, Krozer V, Chen B, Hartnagel H L. High-sensitivity microwave power sensor for GaAs-MMIC implementation. Electron Lett, 1996, 32(23): 2149 doi: 10.1049/el:19961416
[8]
Wang D B, Liao X P. A novel symmetrical microwave power sensor based on MEMS technology. Journal of Semiconductors, 2009, 30(5): 054006 doi: 10.1088/1674-4926/30/5/054006
[9]
Wang D B, Liao X P. A terminating-type MEMS microwave power sensor and its amplification system. Journal of Micromechanics and Microengineering, 2010, 20(7): 0750218 http://cn.bing.com/academic/profile?id=2126462820&encoded=0&v=paper_preview&mkt=zh-cn
[10]
Wang D B, Liao X P, Liu T. A thermoelectric power sensor and its package based on MEMS technology. IEEE Journal of Microelectromechanical Systems, 2012, 21(1): 121 doi: 10.1109/JMEMS.2011.2174417
Fig. 1.  (Color online) The structure of the power radiation monitoring system.

Fig. 2.  (Color online) The thermoelectric MEMS microwave power sensor.

Fig. 3.  (Color online) The photo of the power radiation monitoring system.

Fig. 4.  The measurement results of the power radiation monitoring system.

[1]
Wang Suocheng, Hao Yongping, Liu Shuangjie. The design and analysis of a MEMS electrothermal actuator. Journal of Semiconductors, 2015, 36(4): 044012 doi: 10.1088/1674-4926/36/4/044012
[2]
Liu Xiong, Yao Yan, Ma Jiahao, et al. Micro packaged MEMS pressure sensor for intracranial pressure measurement. Journal of Semiconductors, 2015, 36(6): 064009 doi: 10.1088/1674-4926/36/6/064009
[3]
Liu Tong, Liao Xiaoping, Wang Debo. Sensitivity of MEMS microwave power sensor with the length of thermopile based on Fourier equivalent model. Journal of Semiconductors, 2011, 32(7): 074009 doi: 10.1088/1674-4926/32/7/074009
[4]
Su Shi, Liao Xiaoping. A capacitive membrane MEMS microwave power sensor in the X-band based on GaAs MMIC technology. Journal of Semiconductors, 2009, 30(5): 054004 doi: 10.1088/1674-4926/30/5/054004
[5]
Xu Yinglin, Liao Xiaoping. Design and fabrication of a terminating type MEMS microwave power sensor. Journal of Semiconductors, 2009, 30(4): 044010 doi: 10.1088/1674-4926/30/4/044010
[6]
Scott J B, Low T S, Cochran S et al. New thermocouple-based microwave/millimeter-wave power sensor MMIC techniques in GaAs. IEEE Trans Microw Theory Tech, 2011, 59(2): 338 doi: 10.1109/TMTT.2010.2087346
[7]
Dehe A, Krozer V, Chen B, Hartnagel H L. High-sensitivity microwave power sensor for GaAs-MMIC implementation. Electron Lett, 1996, 32(23): 2149 doi: 10.1049/el:19961416
[8]
Wang D B, Liao X P. A novel symmetrical microwave power sensor based on MEMS technology. Journal of Semiconductors, 2009, 30(5): 054006 doi: 10.1088/1674-4926/30/5/054006
[9]
Wang D B, Liao X P. A terminating-type MEMS microwave power sensor and its amplification system. Journal of Micromechanics and Microengineering, 2010, 20(7): 0750218 http://cn.bing.com/academic/profile?id=2126462820&encoded=0&v=paper_preview&mkt=zh-cn
[10]
Wang D B, Liao X P, Liu T. A thermoelectric power sensor and its package based on MEMS technology. IEEE Journal of Microelectromechanical Systems, 2012, 21(1): 121 doi: 10.1109/JMEMS.2011.2174417
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    Received: 20 January 2016 Revised: 06 March 2016 Online: Published: 01 August 2016

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      Bo Gao, Jing Yang, Si Jiang, Debo Wang. Application of the thermoelectric MEMS microwave power sensor in a powerradiation monitoring system[J]. Journal of Semiconductors, 2016, 37(8): 084004. doi: 10.1088/1674-4926/37/8/084004 B Gao, J Yang, S Jiang, D B Wang. Application of the thermoelectric MEMS microwave power sensor in a powerradiation monitoring system[J]. J. Semicond., 2016, 37(8): 084004. doi: 10.1088/1674-4926/37/8/084004.Export: BibTex EndNote
      Citation:
      Bo Gao, Jing Yang, Si Jiang, Debo Wang. Application of the thermoelectric MEMS microwave power sensor in a powerradiation monitoring system[J]. Journal of Semiconductors, 2016, 37(8): 084004. doi: 10.1088/1674-4926/37/8/084004

      B Gao, J Yang, S Jiang, D B Wang. Application of the thermoelectric MEMS microwave power sensor in a powerradiation monitoring system[J]. J. Semicond., 2016, 37(8): 084004. doi: 10.1088/1674-4926/37/8/084004.
      Export: BibTex EndNote

      Application of the thermoelectric MEMS microwave power sensor in a powerradiation monitoring system

      doi: 10.1088/1674-4926/37/8/084004
      Funds:

      the Scientific Research Foundation of Nanjing University of Posts and Telecommunications NY215139

      the National Natural Science Foundation of China 11304158

      Project supported by the National Natural Science Foundation of China (No. 11304158), the Province Natural Science Foundation of Jiangsu (No. BK20140890), the Open Research Fund of the Key Laboratory of MEMS of Ministry of Education, Southeast University (No. 3206005302), and the Scientific Research Foundation of Nanjing University of Posts and Telecommunications (Nos. NY213024, NY215139)

      the Scientific Research Foundation of Nanjing University of Posts and Telecommunications NY213024

      the Open Research Fund of the Key Laboratory of MEMS of Ministry of Education, Southeast University 3206005302

      the Province Natural Science Foundation of Jiangsu BK20140890

      More Information
      • Corresponding author: Wang Debo, Email: wdb@njupt.edu.cn
      • Received Date: 2016-01-20
      • Revised Date: 2016-03-06
      • Published Date: 2016-08-01

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