Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor

Yifan Fu; Liuhong Ma; Zhiyong Duan; Weihua Han

doi:10.1088/1674-4926/43/5/054101

J. Semicond. > 2022, Volume 43 > Issue 5 > 054101, doi: 10.1088/1674-4926/43/5/054101

ARTICLES

Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor

Yifan Fu¹, Liuhong Ma^{1, 2, 3,}, Zhiyong Duan^{1, 4} and Weihua Han^{2, 3,}

+ Author Affiliations

Corresponding author: Liuhong Ma, Email: maliuhong@zzu.edu.cn; Weihua Han, Email: weihua@semi.ac.cn

Abstract: We investigated the effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistors which are fabricated on heavily n-type doped silicon-on-insulator substrate. The obvious random telegraph noise and current hysteresis observed at the temperature of 10 K indicate the existence of acceptor-like traps. The position depth of the traps in the oxide from Si/SiO₂ interface is 0.35 nm, calculated by utilizing the dependence of the capture and emission time on the gate voltage. Moreover, by constructing a three-dimensional model of tri-gate device structure in COMSOL Multiphysics simulation software, we achieved the trap density of 1.9 × 10¹² cm^–2 and the energy level position of traps at 0.18 eV below the intrinsic Fermi level.

Key words: junctionless transistor, charge trapping, random telegraph signals

References

[1]	Zhou W H, Zhang S L, Guo S Y, et al. Designing sub-10-nm metal-oxide-semiconductor field-effect transistors via ballistic transport and disparate effective mass: The case of two-dimensional BiN. Phys Rev Appl, 2020, 13(4), 044066 doi: 10.1103/PhysRevApplied.13.044066
[2]	Zhou W H, Zhang S L, Wang Y Y. Anisotropic in-plane ballistic transport in monolayer black arsenic-phosphorus FETs. Adv Electron Mater, 2020, 6(3), 1901281 doi: 10.1002/aelm.201901281
[3]	Jeon D Y, Mouis M, Barraud S, et al. Channel width dependent subthreshold operation of tri-gate junctionless transistors. Solid-State Electron, 2020, 171, 107860 doi: 10.1016/j.sse.2020.107860
[4]	Colinge J P, Lee C W, Afzalian A, et al. Nanowire transistors without junctions. Nat Nanotechnol, 2010, 5, 225 doi: 10.1038/nnano.2010.15
[5]	Mendiratta N, Tripathi S L. A review on performance comparison of advanced MOSFET structures below 45 nm technology node. J Semicond, 2020, 41(6), 061401 doi: 10.1088/1674-4926/41/6/061401
[6]	Lee J, Kim Y, Cho S. Design of poly-Si junctionless Fin-channel FET with quantum-mechanical drift-diffusion models for sub-10-nm technology nodes. IEEE Trans Electron Dev, 2016, 63, 4610 doi: 10.1109/TED.2016.2614990
[7]	Yan R, Kranti A, Ferain I, et al. Investigation of high-performance sub-50 nm junctionless nanowire transistors. Microelectron Reliab, 2011, 51(7), 1166 doi: 10.1016/j.microrel.2011.02.016
[8]	Rudenko T, Nazarov A, Ferain I, et al. Mobility enhancement effect in heavily doped junctionless nanowire silicon-on-insulator metal-oxide-semiconductor field-effect transistors. Appl Phys Lett, 2012, 101, 053511 doi: 10.1063/1.4767353
[9]	Gupta S, Nigam K, Pandey S, et al. Effect of interface trap charges on performance variation of heterogeneous gate dielectric junctionless-TFET. IEEE Trans Electron Dev, 2017, 64(11), 1 doi: 10.1109/TED.2017.2754297
[10]	Nazarov A N, Ferain I, Akhavan N D, et al. Random telegraph-signal noise in junctionless transistors. Appl Phys Lett, 2011, 98(9), 092111 doi: 10.1063/1.3557505
[11]	Berengue O M, Chiquito J. Direct evidence of traps controlling the carriers transport in SnO₂ nanobelts. J Semicond, 2017, 38(12), 122001 doi: 10.1088/1674-4926/38/12/122001
[12]	Ma L H, Han W H, Wang H, et al. Charge trapping in surface accumulation layer of heavily doped junctionless nanowire transistors. Chin Phys B, 2015, 024(012), 589 doi: 10.1088/1674-1056/24/12/128101
[13]	Hu G X, Hu S Y, Feng J H, et al. Analytical models for channel potential, threshold voltage, and subthreshold swing of junctionless triple-gate FinFETs. Microelectron J, 2016, 50, 60 doi: 10.1016/j.mejo.2016.02.003
[14]	Liu F Y, Liu H Z, Liu B W, et al. An analytical model for nanowire junctionless SOI FinFETs with considering three-dimensional coupling effect. Chin Phys B, 2016, 25(4), 047305 doi: 10.1088/1674-1056/25/4/047305
[15]	Ávila-Herreraa F, Pazb B C, Cerdeira A. Charge-based compact analytical model for triple-gate junctionless nanowire transistors. Solid-State Electron, 2016, 122(1), 23 doi: 10.1016/j.sse.2016.04.013
[16]	Liang Y Y, Jang Kyungsoo, Velumani S, et al. Effects of interface trap density on the electrical performance of amorphous InSnZnO thin-film transistor. J Semicond, 2015, 36(2), 024007 doi: 10.1088/1674-4926/36/2/024007
[17]	Liu F, Wang K L, Li C, et al. Study of random telegraph signals in single-walled carbon nanotube field effect transistors. IEEE Trans Nanotechnol, 2006, 5(5), 441 doi: 10.1109/TNANO.2006.880906
[18]	Sun Y, Zhang L N, Ahmed Z, et al. Characterization of interface trap dynamics responsible for hysteresis in organic thin-film transistors. Org Electron, 2015, 27, 192 doi: 10.1016/j.orgel.2015.09.011
[19]	Amarasinghe N V, Elik-Butler Z, Vasina P, et al. Characterization of oxide traps in 0.15 μm² MOSFETs using random telegraph signals. Microelectron Reliab, 2000, 40(11), 1875 doi: 10.1016/S0026-2714(00)00089-5
[20]	Celik-Butler Z, Vasina P. A method for locating the position of oxide traps responsible for random telegraph signals in submicron MOSFETs. IEEE Trans Electron Dev, 2000, 47(3), 646 doi: 10.1109/16.824742
[21]	Cheng Y C, Chen H B, Han M H, et al. Temperature dependence of electronic behaviors in quantum dimension junctionless thin-film transistor. Nanoscale Res Lett, 2014, 9(1), 1 doi: 10.1186/1556-276X-9-392

Fig. 1. (Color online) Schematic diagrams of the fabrication process for JNTs.

DownLoad: Full-Size Img PowerPoint

Fig. 2. (Color online) (a) The color SEM image of devices with the gate length of 280 nm. (b) The cross-section schematics of the devices.

DownLoad: Full-Size Img PowerPoint

Fig. 3. (Color online) Measured drain current characteristics at room temperature, showing (a) drain current versus gate voltage for drain voltages of 0.1 to 4.1 V with step of 1 V, and (b) drain current versus drain voltage for gate voltages from 1 to 4 V with step of 1 V.

DownLoad: Full-Size Img PowerPoint

Fig. 4. (Color online) (a) I_DS–V_DS output characteristics of JNT device at T = 10 K. (b) The transfer characteristics of the JNT with V_GS sweep from 0 to 3.5 V and back.

DownLoad: Full-Size Img PowerPoint

Fig. 5. (Color online) (a) I_DS–V_GS curves for V_DS values ranging from 2 to 10 mV in steps of 2 mV. The detail image in the upper left corner is an enlarged detail. (b) Time domain current levels versus time trace at V_GS = 2.2 V and V_DS = 10 mV.

DownLoad: Full-Size Img PowerPoint

Fig. 6. (Color online) ln(τ_c/τ_e) and its linear fitting. The slope is proportional to x_T, the position of the traps in the oxide.

DownLoad: Full-Size Img PowerPoint

Fig. 7. (Color online) (a) Transfer characteristics at the temperatures of 100 to 300 K with the step of 50 K. (b) Measured V_TH and SS at V_DS = 0.1 V versus temperature. The black dashed line represents the theoretical value of subthreshold swing SS_theo.

DownLoad: Full-Size Img PowerPoint

Fig. 8. (Color online) (a) Simulated I_DS–V_GS curves for different trap densities with the trap level equals to the intrinsic Fermi level. (b) Threshold voltage as a function of trap densities with different trap levels.

DownLoad: Full-Size Img PowerPoint

[1]	Zhou W H, Zhang S L, Guo S Y, et al. Designing sub-10-nm metal-oxide-semiconductor field-effect transistors via ballistic transport and disparate effective mass: The case of two-dimensional BiN. Phys Rev Appl, 2020, 13(4), 044066 doi: 10.1103/PhysRevApplied.13.044066
[2]	Zhou W H, Zhang S L, Wang Y Y. Anisotropic in-plane ballistic transport in monolayer black arsenic-phosphorus FETs. Adv Electron Mater, 2020, 6(3), 1901281 doi: 10.1002/aelm.201901281
[3]	Jeon D Y, Mouis M, Barraud S, et al. Channel width dependent subthreshold operation of tri-gate junctionless transistors. Solid-State Electron, 2020, 171, 107860 doi: 10.1016/j.sse.2020.107860
[4]	Colinge J P, Lee C W, Afzalian A, et al. Nanowire transistors without junctions. Nat Nanotechnol, 2010, 5, 225 doi: 10.1038/nnano.2010.15
[5]	Mendiratta N, Tripathi S L. A review on performance comparison of advanced MOSFET structures below 45 nm technology node. J Semicond, 2020, 41(6), 061401 doi: 10.1088/1674-4926/41/6/061401
[6]	Lee J, Kim Y, Cho S. Design of poly-Si junctionless Fin-channel FET with quantum-mechanical drift-diffusion models for sub-10-nm technology nodes. IEEE Trans Electron Dev, 2016, 63, 4610 doi: 10.1109/TED.2016.2614990
[7]	Yan R, Kranti A, Ferain I, et al. Investigation of high-performance sub-50 nm junctionless nanowire transistors. Microelectron Reliab, 2011, 51(7), 1166 doi: 10.1016/j.microrel.2011.02.016
[8]	Rudenko T, Nazarov A, Ferain I, et al. Mobility enhancement effect in heavily doped junctionless nanowire silicon-on-insulator metal-oxide-semiconductor field-effect transistors. Appl Phys Lett, 2012, 101, 053511 doi: 10.1063/1.4767353
[9]	Gupta S, Nigam K, Pandey S, et al. Effect of interface trap charges on performance variation of heterogeneous gate dielectric junctionless-TFET. IEEE Trans Electron Dev, 2017, 64(11), 1 doi: 10.1109/TED.2017.2754297
[10]	Nazarov A N, Ferain I, Akhavan N D, et al. Random telegraph-signal noise in junctionless transistors. Appl Phys Lett, 2011, 98(9), 092111 doi: 10.1063/1.3557505
[11]	Berengue O M, Chiquito J. Direct evidence of traps controlling the carriers transport in SnO₂ nanobelts. J Semicond, 2017, 38(12), 122001 doi: 10.1088/1674-4926/38/12/122001
[12]	Ma L H, Han W H, Wang H, et al. Charge trapping in surface accumulation layer of heavily doped junctionless nanowire transistors. Chin Phys B, 2015, 024(012), 589 doi: 10.1088/1674-1056/24/12/128101
[13]	Hu G X, Hu S Y, Feng J H, et al. Analytical models for channel potential, threshold voltage, and subthreshold swing of junctionless triple-gate FinFETs. Microelectron J, 2016, 50, 60 doi: 10.1016/j.mejo.2016.02.003
[14]	Liu F Y, Liu H Z, Liu B W, et al. An analytical model for nanowire junctionless SOI FinFETs with considering three-dimensional coupling effect. Chin Phys B, 2016, 25(4), 047305 doi: 10.1088/1674-1056/25/4/047305
[15]	Ávila-Herreraa F, Pazb B C, Cerdeira A. Charge-based compact analytical model for triple-gate junctionless nanowire transistors. Solid-State Electron, 2016, 122(1), 23 doi: 10.1016/j.sse.2016.04.013
[16]	Liang Y Y, Jang Kyungsoo, Velumani S, et al. Effects of interface trap density on the electrical performance of amorphous InSnZnO thin-film transistor. J Semicond, 2015, 36(2), 024007 doi: 10.1088/1674-4926/36/2/024007
[17]	Liu F, Wang K L, Li C, et al. Study of random telegraph signals in single-walled carbon nanotube field effect transistors. IEEE Trans Nanotechnol, 2006, 5(5), 441 doi: 10.1109/TNANO.2006.880906
[18]	Sun Y, Zhang L N, Ahmed Z, et al. Characterization of interface trap dynamics responsible for hysteresis in organic thin-film transistors. Org Electron, 2015, 27, 192 doi: 10.1016/j.orgel.2015.09.011
[19]	Amarasinghe N V, Elik-Butler Z, Vasina P, et al. Characterization of oxide traps in 0.15 μm² MOSFETs using random telegraph signals. Microelectron Reliab, 2000, 40(11), 1875 doi: 10.1016/S0026-2714(00)00089-5
[20]	Celik-Butler Z, Vasina P. A method for locating the position of oxide traps responsible for random telegraph signals in submicron MOSFETs. IEEE Trans Electron Dev, 2000, 47(3), 646 doi: 10.1109/16.824742
[21]	Cheng Y C, Chen H B, Han M H, et al. Temperature dependence of electronic behaviors in quantum dimension junctionless thin-film transistor. Nanoscale Res Lett, 2014, 9(1), 1 doi: 10.1186/1556-276X-9-392

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Received: 24 December 2021 Revised: 21 January 2022 Online: Accepted Manuscript: 08 April 2022Uncorrected proof: 11 April 2022Published: 01 May 2022

Article Navigation > Journal of Semiconductors > 2022 > 43(5): 054101

Yifan Fu, Liuhong Ma, Zhiyong Duan, Weihua Han. Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor[J]. Journal of Semiconductors, 2022, 43(5): 054101. doi: 10.1088/1674-4926/43/5/054101 Y F Fu, L H Ma, Z Y Duan, W H Han. Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor[J]. J. Semicond, 2022, 43(5): 054101. doi: 10.1088/1674-4926/43/5/054101Export: BibTex EndNote

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Yifan Fu, Liuhong Ma, Zhiyong Duan, Weihua Han. Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor[J]. Journal of Semiconductors, 2022, 43(5): 054101. doi: 10.1088/1674-4926/43/5/054101

Y F Fu, L H Ma, Z Y Duan, W H Han. Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor[J]. J. Semicond, 2022, 43(5): 054101. doi: 10.1088/1674-4926/43/5/054101

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Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor

doi: 10.1088/1674-4926/43/5/054101

Yifan Fu¹,
Liuhong Ma^{1, 2, 3,},
Zhiyong Duan^{1, 4},
Weihua Han^{2, 3,}

1.
School of Physics and Microelectronics, Zhengzhou University, Zhengzhou 450001, China
2.
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
3.
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100083, China
4.
Institute of Intelligence Sensing in Zhengzhou University, Zhengzhou 450001, China

More Information

Author Bio:
Yifan Fu was born in 1997. She received a BE degrees in Communication Engineering in 2018 from Northeastern University. She is studying for a master‘s degree at Zhengzhou University

Liuhong Ma is a lecturer of the School of Physics and Microelectronics, Zhengzhou University. Her reseach interests include nanoelectronic device integration technology and micro-nano processing technology development and nanoscale transistors

Weihua Han is a research fellow of the Institute of Semiconductors, Chinese Academy of Sciences. His research interests include semiconductor nanostructured electronic and optoelectronic devices and their applications
Corresponding author: Email: maliuhong@zzu.edu.cn; Email: weihua@semi.ac.cn
Received Date: 2021-12-24
Revised Date: 2022-01-21

Available Online: 2022-04-08

Abstract

Abstract

We investigated the effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistors which are fabricated on heavily n-type doped silicon-on-insulator substrate. The obvious random telegraph noise and current hysteresis observed at the temperature of 10 K indicate the existence of acceptor-like traps. The position depth of the traps in the oxide from Si/SiO₂ interface is 0.35 nm, calculated by utilizing the dependence of the capture and emission time on the gate voltage. Moreover, by constructing a three-dimensional model of tri-gate device structure in COMSOL Multiphysics simulation software, we achieved the trap density of 1.9 × 10¹² cm^–2 and the energy level position of traps at 0.18 eV below the intrinsic Fermi level.
- junctionless transistor,
- charge trapping,
- random telegraph signals

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References(21)

References

[1]	Zhou W H, Zhang S L, Guo S Y, et al. Designing sub-10-nm metal-oxide-semiconductor field-effect transistors via ballistic transport and disparate effective mass: The case of two-dimensional BiN. Phys Rev Appl, 2020, 13(4), 044066 doi: 10.1103/PhysRevApplied.13.044066
[2]	Zhou W H, Zhang S L, Wang Y Y. Anisotropic in-plane ballistic transport in monolayer black arsenic-phosphorus FETs. Adv Electron Mater, 2020, 6(3), 1901281 doi: 10.1002/aelm.201901281
[3]	Jeon D Y, Mouis M, Barraud S, et al. Channel width dependent subthreshold operation of tri-gate junctionless transistors. Solid-State Electron, 2020, 171, 107860 doi: 10.1016/j.sse.2020.107860
[4]	Colinge J P, Lee C W, Afzalian A, et al. Nanowire transistors without junctions. Nat Nanotechnol, 2010, 5, 225 doi: 10.1038/nnano.2010.15
[5]	Mendiratta N, Tripathi S L. A review on performance comparison of advanced MOSFET structures below 45 nm technology node. J Semicond, 2020, 41(6), 061401 doi: 10.1088/1674-4926/41/6/061401
[6]	Lee J, Kim Y, Cho S. Design of poly-Si junctionless Fin-channel FET with quantum-mechanical drift-diffusion models for sub-10-nm technology nodes. IEEE Trans Electron Dev, 2016, 63, 4610 doi: 10.1109/TED.2016.2614990
[7]	Yan R, Kranti A, Ferain I, et al. Investigation of high-performance sub-50 nm junctionless nanowire transistors. Microelectron Reliab, 2011, 51(7), 1166 doi: 10.1016/j.microrel.2011.02.016
[8]	Rudenko T, Nazarov A, Ferain I, et al. Mobility enhancement effect in heavily doped junctionless nanowire silicon-on-insulator metal-oxide-semiconductor field-effect transistors. Appl Phys Lett, 2012, 101, 053511 doi: 10.1063/1.4767353
[9]	Gupta S, Nigam K, Pandey S, et al. Effect of interface trap charges on performance variation of heterogeneous gate dielectric junctionless-TFET. IEEE Trans Electron Dev, 2017, 64(11), 1 doi: 10.1109/TED.2017.2754297
[10]	Nazarov A N, Ferain I, Akhavan N D, et al. Random telegraph-signal noise in junctionless transistors. Appl Phys Lett, 2011, 98(9), 092111 doi: 10.1063/1.3557505
[11]	Berengue O M, Chiquito J. Direct evidence of traps controlling the carriers transport in SnO₂ nanobelts. J Semicond, 2017, 38(12), 122001 doi: 10.1088/1674-4926/38/12/122001
[12]	Ma L H, Han W H, Wang H, et al. Charge trapping in surface accumulation layer of heavily doped junctionless nanowire transistors. Chin Phys B, 2015, 024(012), 589 doi: 10.1088/1674-1056/24/12/128101
[13]	Hu G X, Hu S Y, Feng J H, et al. Analytical models for channel potential, threshold voltage, and subthreshold swing of junctionless triple-gate FinFETs. Microelectron J, 2016, 50, 60 doi: 10.1016/j.mejo.2016.02.003
[14]	Liu F Y, Liu H Z, Liu B W, et al. An analytical model for nanowire junctionless SOI FinFETs with considering three-dimensional coupling effect. Chin Phys B, 2016, 25(4), 047305 doi: 10.1088/1674-1056/25/4/047305
[15]	Ávila-Herreraa F, Pazb B C, Cerdeira A. Charge-based compact analytical model for triple-gate junctionless nanowire transistors. Solid-State Electron, 2016, 122(1), 23 doi: 10.1016/j.sse.2016.04.013
[16]	Liang Y Y, Jang Kyungsoo, Velumani S, et al. Effects of interface trap density on the electrical performance of amorphous InSnZnO thin-film transistor. J Semicond, 2015, 36(2), 024007 doi: 10.1088/1674-4926/36/2/024007
[17]	Liu F, Wang K L, Li C, et al. Study of random telegraph signals in single-walled carbon nanotube field effect transistors. IEEE Trans Nanotechnol, 2006, 5(5), 441 doi: 10.1109/TNANO.2006.880906
[18]	Sun Y, Zhang L N, Ahmed Z, et al. Characterization of interface trap dynamics responsible for hysteresis in organic thin-film transistors. Org Electron, 2015, 27, 192 doi: 10.1016/j.orgel.2015.09.011
[19]	Amarasinghe N V, Elik-Butler Z, Vasina P, et al. Characterization of oxide traps in 0.15 μm² MOSFETs using random telegraph signals. Microelectron Reliab, 2000, 40(11), 1875 doi: 10.1016/S0026-2714(00)00089-5
[20]	Celik-Butler Z, Vasina P. A method for locating the position of oxide traps responsible for random telegraph signals in submicron MOSFETs. IEEE Trans Electron Dev, 2000, 47(3), 646 doi: 10.1109/16.824742
[21]	Cheng Y C, Chen H B, Han M H, et al. Temperature dependence of electronic behaviors in quantum dimension junctionless thin-film transistor. Nanoscale Res Lett, 2014, 9(1), 1 doi: 10.1186/1556-276X-9-392

Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor

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