Chin. J. Semicond. > 1994, Volume 15 > Issue 8 > 533-539
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用离子束辅助淀积多层薄膜技术合成Co－Si化合物薄膜的研究

杨杰，阎忻水，陶琨，范玉殿

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    Received: 18 August 2015 Revised: Online: Published: 01 August 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(8): 533-539
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      • Received Date: 2015-08-18

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