Chin. J. Semicond. > 2006, Volume 27 > Issue 11 > 1955-1960

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Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor

Xue Chunlai, Yao Fei, Cheng Buwen and Wang Qiming

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Abstract: The effect of substrate structure on the performance of a spiral inductor is investigated with the 3D electromagnetic simulator HFSS.With variations in the substrate structure including substrate conductivity,permittivity,and thickness of the dielectric layer, the performance of the inductors is analyzed in detail.The simulation results indicate that the performance of the spiral inductor can be improved by lowering the conductivity of the substrate,increasing the thickness of the dielectric layer,and using a low k dielectric layer.In the mean time,some "design rules" are summarized form the results of this study.

Key words: siliconspiral inductorquality factorsubstrate structure

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    Received: 18 August 2015 Revised: Online: Published: 01 November 2006

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      Xue Chunlai, Yao Fei, Cheng Buwen, Wang Qiming. Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor[J]. Journal of Semiconductors, 2006, In Press. Xue C L, Yao F, Cheng B W, Wang Q M. Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor[J]. Chin. J. Semicond., 2006, 27(11): 1955.Export: BibTex EndNote
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      Xue Chunlai, Yao Fei, Cheng Buwen, Wang Qiming. Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor[J]. Journal of Semiconductors, 2006, In Press.

      Xue C L, Yao F, Cheng B W, Wang Q M. Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor[J]. Chin. J. Semicond., 2006, 27(11): 1955.
      Export: BibTex EndNote

      Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor

      • Received Date: 2015-08-18

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