Chin. J. Semicond. > 2004, Volume 25 > Issue 12 > 1606-1611

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基于阳极键合干法刻蚀技术的MEMS隧道加速度计的加工及测试(英文)

董海峰 , 郝一龙 , 贾玉斌 , 闫桂珍 , 王颖 and 李婷

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Key words: 隧道效应, 加速度计, 微机电系统

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2004

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      • Received Date: 2015-08-19

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