Fig. 1.
(Color online) Schematic diagram of the device fabrication processes.
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Zeyang Ren, Jinfeng Zhang, Jincheng Zhang, Chunfu Zhang, Pengzhi Yang, Dazheng Chen, Yao Li, Yue Hao. Research on the hydrogen terminated single crystal diamond MOSFET with MoO3 dielectric and gold gate metal[J]. Journal of Semiconductors, 2018, 39(7): 074003. doi: 10.1088/1674-4926/39/7/074003
Z Y Ren, J F Zhang, J C Zhang, C F Zhang, P Z Yang, D Z Chen, Y Li, Y Hao, Research on the hydrogen terminated single crystal diamond MOSFET with MoO3 dielectric and gold gate metal[J]. J. Semicond., 2018, 39(7): 074003. doi: 10.1088/1674-4926/39/7/074003.
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Research on the hydrogen terminated single crystal diamond MOSFET with MoO3 dielectric and gold gate metal
doi: 10.1088/1674-4926/39/7/074003
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Abstract
The single crystal diamond with maximum width about 10 mm has been grown by using microwave plasma chemical vapor deposition equipment. The quality of the grown diamond was characterized using an X-ray diffractometer. The FWHM of the (004) rocking curve is 37.91 arcsec, which is comparable to the result of the electronic grade single crystal diamond commercially obtained from Element Six Ltd. The hydrogen terminated diamond field effect transistors with Au/MoO3 gates were fabricated based on our CVD diamond and the characteristics of the device were compared with the prototype Al/MoO3 gate. The device with the Au/MoO3 gate shows lower on-resistance and higher gate leakage current. The detailed analysis indicates the presence of aluminum oxide at the Al/MoO3 interface, which has been directly demonstrated by characterizing the interface between Al and MoO3 by X-ray photoelectron spectroscopy. In addition, there should be a surface transfer doping effect of the MoO3 layer on H-diamond even with the atmospheric-adsorbate induced 2DHG preserved after MoO3 deposition.-
Keywords:
- single crystal diamond,
- MOSFET,
- MoO3,
- transfer doping
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References
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