A readout system for passive pressure sensors

Huixin Zhang; Yingping Hong; Binger Ge; Ting Liang; Jijun Xiong

doi:10.1088/1674-4926/34/12/125006

J. Semicond. > 2013, Volume 34 > Issue 12 > 125006, doi: 10.1088/1674-4926/34/12/125006

SEMICONDUCTOR INTEGRATED CIRCUITS

A readout system for passive pressure sensors

Huixin Zhang^{1, 2,}, Yingping Hong^{1, 2}, Binger Ge^{1, 2}, Ting Liang^{1, 2} and Jijun Xiong^{1, 2}

+ Author Affiliations

Corresponding author: Zhang Huixin, zhanghx@nuc.edu.cn

Abstract: This paper presents a readout system for the passive pressure sensors which consist of a pressure-sensitive capacitor and an inductance coil to form an LC circuit. The LC circuit transforms the pressure variation into the LC resonant frequency shift. The proposed system is composed of a reader antenna inductively coupled to the sensor inductor, a measurement circuit, and a PC post-processing unit. The measurement circuit generates a DC output voltage related to the sensor's resonant frequency and converts the output voltage into digital form. The PC post-processing unit processes the digital data and calculates the sensor's resonant frequency. To test the performance of the readout system, a sensor is designed and fabricated based on low temperature co-fired ceramic (LTCC), and a series of testing experiments is carried out. The experimental results show good agreement with the impedance analyzer's results, their error is less than 2.5%, and the measured values are almost insensitive to the variation of readout distance. It proves that the proposed system is effective practically.

Key words: passive pressure sensor, LC resonant circuit, resonant frequency, inductive coupling, wireless

References

[1]	Prosser S J. Advances in sensors for aerospace applications. Sensors and Actuators A:Physical, 1993, 37/38:128 doi: 10.1016/0924-4247(93)80024-B
[2]	Johnson R W, Evans J L, Jacobsen P, et al. The changing automotive environment:high-temperature electronics. IEEE Trans Electron Packag Manuf, 2004, 27(3):164 doi: 10.1109/TEPM.2004.843109
[3]	Puers R, Vandevoorde G, Bruyke R D D, et al. Electrodeposited copper inductors for intraocular pressure telemetry. J Micromechan Microeng, 2002, 10(2):124
[4]	Chen P J, Rodger D C, Saati S, et al. Microfabricated implantable parylene-based wireless passive intraocular pressure sensors. J Micro-Electromechan Syst, 2008, 17(6):1342 doi: 10.1109/JMEMS.2008.2004945
[5]	Nabipoor M, Majlis B Y. A new passive telemetry LC pressure and temperature sensor optimized for TPMS. J Phys:Conference Series, 2006, 34:770 doi: 10.1088/1742-6596/34/1/127
[6]	Fonseca M A. Polymer/ceramic wireless MEMS pressure sensors for harsh environments:high temperature and biomedical applications. School of Electrical and Computer Engineering, 2007 http://adsabs.harvard.edu/abs/2007PhDT........96F
[7]	Fonseca M A, English J M, Arx M V, et al. Wireless micromachined ceramic pressure sensor for high-temperature applications. J Microelectromechan Syst, 2002, 11(4):337 doi: 10.1109/JMEMS.2002.800939
[8]	Chen P J, Saati S, Varma R, et al. Implantable flexible-coiled wireless intraocular pressure sensor. Micro Electro Mechanical Systems, Sorrento, 2009:244
[9]	Liu Q. Research of the passive wireless tire pressure sensor based on the SAWR and tire impedance. Guilin University of Electronic Technology, 2010
[10]	Park E C, Yoon E, Yoon J B. Hermetically sealed inductor-capacitor (LC) resonator for remote pressure monitoring. Jpn J Appl Phys, 1998, 37(12B):7124 http://adsabs.harvard.edu/abs/1998JaJAP..37.7124P
[11]	Coosemans J, Catrysse M, Puers R. A readout circuit for an intraocular pressure sensor. Sensors and Actuators A, 2004, 110(1-3):432 doi: 10.1016/j.sna.2003.09.015
[12]	Yoon H J, Jung J M, Jeong J S, et al. Micro devices for a cerebrospinal fluid (CSF) shunt system. Sensors and Actuators A, 2004, 110(1-3):68 doi: 10.1016/j.sna.2003.10.047
[13]	Harpster T J, Stark B, Najafi K. A passive wireless integrated humidity sensor. Sensors and Actuators A, 2002, 95(2/3):100 http://ieeexplore.ieee.org/document/906601/
[14]	Xiong J J, Zheng S J, Hong Y P, et al. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology. Journal of Zhejiang University Science C, 2013, 14(4):258 doi: 10.1631/jzus.C12MNT04
[15]	Mohan S S, Del Mar Hershenson M, Boyd S P, et al. Simple accurate expressions for planar spiral inductances. IEEE J Solid-state Circuits, 1999, 34(10):1419 doi: 10.1109/4.792620
[16]	Xiong J J, Li Y, Hong Y P, et al. Wireless LTCC-based capacitive pressure sensor for harsh environment. Sensors and Actuators A:Physical, 2013, 197:30 doi: 10.1016/j.sna.2013.04.007
[17]	Wang Y, Jia Y, Chen Q S, et al. A passive wireless temperature sensor for harsh environment applications. Sensors, 2008, 8(12):7982 doi: 10.3390/s8127982
[18]	Qiu G Y. Circuit. Beijing:Higher Education Press, 1999

Fig. 1. Coupling model.

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Fig. 2. Cross section of the sensor.

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Fig. 3. The fabrication process steps.

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Fig. 4. Sensor sample.

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Fig. 5. An analytical model of the measurement circuit.

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Fig. 6. The simulation results, where the theoretical resonant frequency of the sensor is 28.71 MHz, $L_{1}$

$=$

$L_{2}$

$=$ 2364 nH, $C_{1}$ $=$ 15 pF, $C_{2}$ $=$ 13 pF. (a) The DC output voltage before being coupled. (b) The DC output voltage after being coupled.

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Fig. 7. Prototype of the designed measurement circuit.

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Fig. 8. Test platform.

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Fig. 9. The waveform displayed on the oscilloscope, where the pressure is 0 bar, the readout distance is 6 mm. (a) The waveform before being coupled. (b) The waveform after being coupled.

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Fig. 10. Measured output voltage of the measurement circuit, where the measured resonant frequency of the sensor is 31.286 MHz, the readout distance is 6 mm. (a) Measured output voltage before beging coupled. (b) Measured output voltage after beging coupled.

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Fig. 11. Resonant frequency versus readout distance.

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Fig. 12. Normalized comparison of measurement circuit's and impedance analyzer's results.

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Fig. 13. Measured output voltage of the measurement circuit, where the readout distance is 8 mm. (a) With the medium. (b) Without the medium.

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Table 1. Design parameters of the sensor's inductor.

[1]	Prosser S J. Advances in sensors for aerospace applications. Sensors and Actuators A:Physical, 1993, 37/38:128 doi: 10.1016/0924-4247(93)80024-B
[2]	Johnson R W, Evans J L, Jacobsen P, et al. The changing automotive environment:high-temperature electronics. IEEE Trans Electron Packag Manuf, 2004, 27(3):164 doi: 10.1109/TEPM.2004.843109
[3]	Puers R, Vandevoorde G, Bruyke R D D, et al. Electrodeposited copper inductors for intraocular pressure telemetry. J Micromechan Microeng, 2002, 10(2):124
[4]	Chen P J, Rodger D C, Saati S, et al. Microfabricated implantable parylene-based wireless passive intraocular pressure sensors. J Micro-Electromechan Syst, 2008, 17(6):1342 doi: 10.1109/JMEMS.2008.2004945
[5]	Nabipoor M, Majlis B Y. A new passive telemetry LC pressure and temperature sensor optimized for TPMS. J Phys:Conference Series, 2006, 34:770 doi: 10.1088/1742-6596/34/1/127
[6]	Fonseca M A. Polymer/ceramic wireless MEMS pressure sensors for harsh environments:high temperature and biomedical applications. School of Electrical and Computer Engineering, 2007 http://adsabs.harvard.edu/abs/2007PhDT........96F
[7]	Fonseca M A, English J M, Arx M V, et al. Wireless micromachined ceramic pressure sensor for high-temperature applications. J Microelectromechan Syst, 2002, 11(4):337 doi: 10.1109/JMEMS.2002.800939
[8]	Chen P J, Saati S, Varma R, et al. Implantable flexible-coiled wireless intraocular pressure sensor. Micro Electro Mechanical Systems, Sorrento, 2009:244
[9]	Liu Q. Research of the passive wireless tire pressure sensor based on the SAWR and tire impedance. Guilin University of Electronic Technology, 2010
[10]	Park E C, Yoon E, Yoon J B. Hermetically sealed inductor-capacitor (LC) resonator for remote pressure monitoring. Jpn J Appl Phys, 1998, 37(12B):7124 http://adsabs.harvard.edu/abs/1998JaJAP..37.7124P
[11]	Coosemans J, Catrysse M, Puers R. A readout circuit for an intraocular pressure sensor. Sensors and Actuators A, 2004, 110(1-3):432 doi: 10.1016/j.sna.2003.09.015
[12]	Yoon H J, Jung J M, Jeong J S, et al. Micro devices for a cerebrospinal fluid (CSF) shunt system. Sensors and Actuators A, 2004, 110(1-3):68 doi: 10.1016/j.sna.2003.10.047
[13]	Harpster T J, Stark B, Najafi K. A passive wireless integrated humidity sensor. Sensors and Actuators A, 2002, 95(2/3):100 http://ieeexplore.ieee.org/document/906601/
[14]	Xiong J J, Zheng S J, Hong Y P, et al. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology. Journal of Zhejiang University Science C, 2013, 14(4):258 doi: 10.1631/jzus.C12MNT04
[15]	Mohan S S, Del Mar Hershenson M, Boyd S P, et al. Simple accurate expressions for planar spiral inductances. IEEE J Solid-state Circuits, 1999, 34(10):1419 doi: 10.1109/4.792620
[16]	Xiong J J, Li Y, Hong Y P, et al. Wireless LTCC-based capacitive pressure sensor for harsh environment. Sensors and Actuators A:Physical, 2013, 197:30 doi: 10.1016/j.sna.2013.04.007
[17]	Wang Y, Jia Y, Chen Q S, et al. A passive wireless temperature sensor for harsh environment applications. Sensors, 2008, 8(12):7982 doi: 10.3390/s8127982
[18]	Qiu G Y. Circuit. Beijing:Higher Education Press, 1999

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Received: 12 July 2013 Revised: 11 August 2013 Online: Published: 01 December 2013

Article Navigation > Journal of Semiconductors > 2013 > 34(12): 125006

Huixin Zhang, Yingping Hong, Binger Ge, Ting Liang, Jijun Xiong. A readout system for passive pressure sensors[J]. Journal of Semiconductors, 2013, 34(12): 125006. doi: 10.1088/1674-4926/34/12/125006 H X Zhang, Y P Hong, B E Ge, T Liang, J J Xiong. A readout system for passive pressure sensors[J]. J. Semicond., 2013, 34(12): 125006. doi: 10.1088/1674-4926/34/12/125006.Export: BibTex EndNote

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Huixin Zhang, Yingping Hong, Binger Ge, Ting Liang, Jijun Xiong. A readout system for passive pressure sensors[J]. Journal of Semiconductors, 2013, 34(12): 125006. doi: 10.1088/1674-4926/34/12/125006

H X Zhang, Y P Hong, B E Ge, T Liang, J J Xiong. A readout system for passive pressure sensors[J]. J. Semicond., 2013, 34(12): 125006. doi: 10.1088/1674-4926/34/12/125006.

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H X Zhang, Y P Hong, B E Ge, T Liang, J J Xiong. A readout system for passive pressure sensors[J]. J. Semicond., 2013, 34(12): 125006. doi: 10.1088/1674-4926/34/12/125006.

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A readout system for passive pressure sensors

doi: 10.1088/1674-4926/34/12/125006

1.
Key Laboratory of Instrumentation Science & Dynamic Measurement(North University of China), Ministry of Education, Taiyuan 030051, China
2.
Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of Electronic Science and Technology, North University of China, Taiyuan 030051, China

Funds:

the National Natural Science Foundation of China 51075375

the National Basic Research Program of China 2010CB334703

Project supported by the National Basic Research Program of China (No. 2010CB334703) and the National Natural Science Foundation of China (No. 51075375)

More Information

Corresponding author: Zhang Huixin, zhanghx@nuc.edu.cn
Received Date: 2013-07-12
Revised Date: 2013-08-11
Published Date: 2013-12-01

Abstract

Abstract

This paper presents a readout system for the passive pressure sensors which consist of a pressure-sensitive capacitor and an inductance coil to form an LC circuit. The LC circuit transforms the pressure variation into the LC resonant frequency shift. The proposed system is composed of a reader antenna inductively coupled to the sensor inductor, a measurement circuit, and a PC post-processing unit. The measurement circuit generates a DC output voltage related to the sensor's resonant frequency and converts the output voltage into digital form. The PC post-processing unit processes the digital data and calculates the sensor's resonant frequency. To test the performance of the readout system, a sensor is designed and fabricated based on low temperature co-fired ceramic (LTCC), and a series of testing experiments is carried out. The experimental results show good agreement with the impedance analyzer's results, their error is less than 2.5%, and the measured values are almost insensitive to the variation of readout distance. It proves that the proposed system is effective practically.
- passive pressure sensor,
- LC resonant circuit,
- resonant frequency,
- inductive coupling,
- wireless

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References(18)

References

[1]	Prosser S J. Advances in sensors for aerospace applications. Sensors and Actuators A:Physical, 1993, 37/38:128 doi: 10.1016/0924-4247(93)80024-B
[2]	Johnson R W, Evans J L, Jacobsen P, et al. The changing automotive environment:high-temperature electronics. IEEE Trans Electron Packag Manuf, 2004, 27(3):164 doi: 10.1109/TEPM.2004.843109
[3]	Puers R, Vandevoorde G, Bruyke R D D, et al. Electrodeposited copper inductors for intraocular pressure telemetry. J Micromechan Microeng, 2002, 10(2):124
[4]	Chen P J, Rodger D C, Saati S, et al. Microfabricated implantable parylene-based wireless passive intraocular pressure sensors. J Micro-Electromechan Syst, 2008, 17(6):1342 doi: 10.1109/JMEMS.2008.2004945
[5]	Nabipoor M, Majlis B Y. A new passive telemetry LC pressure and temperature sensor optimized for TPMS. J Phys:Conference Series, 2006, 34:770 doi: 10.1088/1742-6596/34/1/127
[6]	Fonseca M A. Polymer/ceramic wireless MEMS pressure sensors for harsh environments:high temperature and biomedical applications. School of Electrical and Computer Engineering, 2007 http://adsabs.harvard.edu/abs/2007PhDT........96F
[7]	Fonseca M A, English J M, Arx M V, et al. Wireless micromachined ceramic pressure sensor for high-temperature applications. J Microelectromechan Syst, 2002, 11(4):337 doi: 10.1109/JMEMS.2002.800939
[8]	Chen P J, Saati S, Varma R, et al. Implantable flexible-coiled wireless intraocular pressure sensor. Micro Electro Mechanical Systems, Sorrento, 2009:244
[9]	Liu Q. Research of the passive wireless tire pressure sensor based on the SAWR and tire impedance. Guilin University of Electronic Technology, 2010
[10]	Park E C, Yoon E, Yoon J B. Hermetically sealed inductor-capacitor (LC) resonator for remote pressure monitoring. Jpn J Appl Phys, 1998, 37(12B):7124 http://adsabs.harvard.edu/abs/1998JaJAP..37.7124P
[11]	Coosemans J, Catrysse M, Puers R. A readout circuit for an intraocular pressure sensor. Sensors and Actuators A, 2004, 110(1-3):432 doi: 10.1016/j.sna.2003.09.015
[12]	Yoon H J, Jung J M, Jeong J S, et al. Micro devices for a cerebrospinal fluid (CSF) shunt system. Sensors and Actuators A, 2004, 110(1-3):68 doi: 10.1016/j.sna.2003.10.047
[13]	Harpster T J, Stark B, Najafi K. A passive wireless integrated humidity sensor. Sensors and Actuators A, 2002, 95(2/3):100 http://ieeexplore.ieee.org/document/906601/
[14]	Xiong J J, Zheng S J, Hong Y P, et al. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology. Journal of Zhejiang University Science C, 2013, 14(4):258 doi: 10.1631/jzus.C12MNT04
[15]	Mohan S S, Del Mar Hershenson M, Boyd S P, et al. Simple accurate expressions for planar spiral inductances. IEEE J Solid-state Circuits, 1999, 34(10):1419 doi: 10.1109/4.792620
[16]	Xiong J J, Li Y, Hong Y P, et al. Wireless LTCC-based capacitive pressure sensor for harsh environment. Sensors and Actuators A:Physical, 2013, 197:30 doi: 10.1016/j.sna.2013.04.007
[17]	Wang Y, Jia Y, Chen Q S, et al. A passive wireless temperature sensor for harsh environment applications. Sensors, 2008, 8(12):7982 doi: 10.3390/s8127982
[18]	Qiu G Y. Circuit. Beijing:Higher Education Press, 1999

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