Chin. J. Semicond. > 2007, Volume 28 > Issue 6 > 842-847

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Threshold Voltage Model for a Fully Depleted SOI-MOSFETwith a Non-Uniform Profile

Zhang Guohe, Shao Zhibiao and Zhou Kai

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Abstract: A novel approximation of the two-dimensional (2D) potential function perpendicular to the channel is proposed,and then an analytical threshold voltage model for a fully depleted SOI-MOSFET with a non-uniform Gaussian distribution doping profile is given based on this approximation.The model agrees well with numerical simulation by MEDICI.The result represents a new way and some reference points in analyzing and controlling the threshold voltage of non-uniform fully depleted (FD) SOI devices in practice.

Key words: fully depleted SOI-MOSFETnon-uniformsurface potentialthreshold voltage

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    Received: 18 August 2015 Revised: 29 January 2007 Online: Published: 01 June 2007

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      Zhang Guohe, Shao Zhibiao, Zhou Kai. Threshold Voltage Model for a Fully Depleted SOI-MOSFETwith a Non-Uniform Profile[J]. Journal of Semiconductors, 2007, In Press. Zhang G H, Shao Z B, Zhou K. Threshold Voltage Model for a Fully Depleted SOI-MOSFETwith a Non-Uniform Profile[J]. Chin. J. Semicond., 2007, 28(6): 842.Export: BibTex EndNote
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      Zhang Guohe, Shao Zhibiao, Zhou Kai. Threshold Voltage Model for a Fully Depleted SOI-MOSFETwith a Non-Uniform Profile[J]. Journal of Semiconductors, 2007, In Press.

      Zhang G H, Shao Z B, Zhou K. Threshold Voltage Model for a Fully Depleted SOI-MOSFETwith a Non-Uniform Profile[J]. Chin. J. Semicond., 2007, 28(6): 842.
      Export: BibTex EndNote

      Threshold Voltage Model for a Fully Depleted SOI-MOSFETwith a Non-Uniform Profile

      • Received Date: 2015-08-18
      • Accepted Date: 2006-10-26
      • Revised Date: 2007-01-29
      • Published Date: 2007-05-30

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