Chin. J. Semicond. > 2006, Volume 27 > Issue 10 > 1828-1831

PAPERS

A Novel Semi-Insulation Bonding SOI Structure

Tan Kaizhou, Feng Jian, Liu Yong, Xu Shiliu, Yang Mohua, Li Zhaoji, Zhang Zhengfan, Liu Yukui and He Kaiquan

+ Author Affiliations

PDF

Abstract: A novel semi-insulation bonding SOI structure that is realized by LPCVD and introducing an epitaxial interim polysilicon layer is reported.The integrality percentage of this new wafer structure is more than 85%.The contact specific resistance of the Si-Si bonding interface is less than 5E-4Ω·cm2.It can be widely applied in high-voltage ICs,high-reliability ICs,MEMS,and OEIC.

Key words: wafer bondingsemi-insulation SOIinterim polysilicon layer

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2691 Times PDF downloads: 1393 Times Cited by: 0 Times

    History

    Received: 18 August 2015 Revised: 24 April 2006 Online: Published: 01 October 2006

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Tan Kaizhou, Feng Jian, Liu Yong, Xu Shiliu, Yang Mohua, Li Zhaoji, Zhang Zhengfan, Liu Yukui, He Kaiquan. A Novel Semi-Insulation Bonding SOI Structure[J]. Journal of Semiconductors, 2006, In Press. Tan K Z, Feng J, Liu Y, Xu S L, Yang M H, Li Z J, Zhang Z F, Liu Y K, He K Q. A Novel Semi-Insulation Bonding SOI Structure[J]. Chin. J. Semicond., 2006, 27(10): 1828.Export: BibTex EndNote
      Citation:
      Tan Kaizhou, Feng Jian, Liu Yong, Xu Shiliu, Yang Mohua, Li Zhaoji, Zhang Zhengfan, Liu Yukui, He Kaiquan. A Novel Semi-Insulation Bonding SOI Structure[J]. Journal of Semiconductors, 2006, In Press.

      Tan K Z, Feng J, Liu Y, Xu S L, Yang M H, Li Z J, Zhang Z F, Liu Y K, He K Q. A Novel Semi-Insulation Bonding SOI Structure[J]. Chin. J. Semicond., 2006, 27(10): 1828.
      Export: BibTex EndNote

      A Novel Semi-Insulation Bonding SOI Structure

      • Received Date: 2015-08-18
      • Accepted Date: 2006-03-11
      • Revised Date: 2006-04-24
      • Published Date: 2006-10-12

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return