Chin. J. Semicond. > 2007, Volume 28 > Issue 11 > 1679-1684

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Cost-Effective VDMOS and Compatible Process for PDP Scan-Driver IC

Li Xiaoming, Zhuang Yiqi, Zhang Li and Xin Weiping

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Abstract: A VDMOS integrated in a 170V scan-driver chip of a plasma display panel (PDP) is described,which is based on epitaxial bipolar-CMOS-DMOS (BCD) technology.Some key considerations and parameters of the design are discussed.The thickness of epitaxial layer is 17μm,the area of a single VDMOS structure cell is 324μm2,and only 18 photoetching steps are needed in the development process.It is also compatible with standard CMOS,bipolar,and p-LDMOS devices.The breakdown voltage of VDMOS in the process control module (PCM) is more than 200V.Five kinds of VDMOS modules are integrated in 64 channel PDP scan-driver IC,and on-line system verification is done on a LG-model-42v6 PDP.

Key words: PDP VDMOS BCD process cost-effective structure cell

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    Received: 18 August 2015 Revised: 26 July 2007 Online: Published: 01 November 2007

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      Li Xiaoming, Zhuang Yiqi, Zhang Li, Xin Weiping. Cost-Effective VDMOS and Compatible Process for PDP Scan-Driver IC[J]. Journal of Semiconductors, 2007, In Press. Li X M, Zhuang Y Q, Zhang L, Xin W P. Cost-Effective VDMOS and Compatible Process for PDP Scan-Driver IC[J]. Chin. J. Semicond., 2007, 28(11): 1679.Export: BibTex EndNote
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      Li Xiaoming, Zhuang Yiqi, Zhang Li, Xin Weiping. Cost-Effective VDMOS and Compatible Process for PDP Scan-Driver IC[J]. Journal of Semiconductors, 2007, In Press.

      Li X M, Zhuang Y Q, Zhang L, Xin W P. Cost-Effective VDMOS and Compatible Process for PDP Scan-Driver IC[J]. Chin. J. Semicond., 2007, 28(11): 1679.
      Export: BibTex EndNote

      Cost-Effective VDMOS and Compatible Process for PDP Scan-Driver IC

      • Received Date: 2015-08-18
      • Accepted Date: 2007-05-21
      • Revised Date: 2007-07-26
      • Published Date: 2007-10-24

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