| Citation: |
Zhang Weihua, Zhao Gaoyang, Li Ying, Zhao Wei. Photosensitive Barium Strontium Titanate Gel Films and Their Fine-Patterning[J]. Journal of Semiconductors, 2006, In Press.
Zhang W H, Zhao G Y, Li Y, Zhao W. Photosensitive Barium Strontium Titanate Gel Films and Their Fine-Patterning[J]. Chin. J. Semicond., 2006, 27(9): 1590.
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Photosensitive Barium Strontium Titanate Gel Films and Their Fine-Patterning
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Abstract
A method is developed to fabricate fine patterns of BST films.With methanol as solvent,barium acetate,strontium chloride,and tetrabutyl titanate as starting materials,lactic acid as catalyzer,and Benzoylacetone (BzAcH) as chemical modifier,the photosensitive BST sols and their gel films with a chelate structure of ≡Ti-BzAc are prepared,both of which have good chemical stability at room atmosphere.The UV absorption peak of the chelate structure is located at about 358nm.The chelate structure can be dissociated using UV light from a high-pressure mercury lamp to irradiate the gel films,which shows the photosensitivity of the gel films.Due to the dissociation of the chelate structure,the solubility of the gel films in alcohol is remarkably decreased.Utilizing the photosensitivity,the BST gel films are irradiated by UV light through a pattern mask and leached by alcohol.The fine patterning of BST gel film is thus prepared.After annealing at 600℃,the fine patterning of BST films with perovskite structure and ferroelectric properties can be obtained. -
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