SEMICONDUCTOR DEVICES

A thru-reflect-line calibration for measuring the characteristics of high power LDMOS transistors

Shuai Wang, Ke Li, Yibo Jiang, Mifang Cong, Huan Du and Zhengsheng Han

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 Corresponding author: Han Zhengsheng, Email:zshan@ime.ac.cn

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Abstract: The impedance and output power measurements of LDMOS transistors are always a problem due to their low impedance and lead widths. An improved thru-reflect-line (TRL) calibration algorithm for measuring the characteristics of L-band high power LDMOS transistors is presented. According to the TRL algorithm, the individual two-port S parameters of each fixture half can be obtained. By de-embedding these S parameters of the test fixture, an accurate calibration can be made. The improved TRL calibration algorithm is successfully utilized to measure the characteristics of an L-band LDMOS transistor with a 90 mm gate width. The impedance of the transistor is obtained, and output power at 1 dB compression point can reach as much as 109.4 W at 1.2 GHz, achieving 1.2 W/mm power density. From the results, it is seen that the presented TRL calibration algorithm works well.

Key words: thru-reflect-linelateral double-diffused MOSFETlow impedance test fixtureimpedanceoutput power



[1]
Ma R, Han G, Chen X, et al. Calibrating an arbitrary test fixture for a symmetric device by three measurements. IEEE Trans Instrumentation Measurement, 2010, 59(1):145 doi: 10.1109/TIM.2009.2022111
[2]
Engen G F, Hoer C A. Thru-reflect-line:an improved technique for calibrating the dual six-port automatic network analyzer. IEEE Trans Microw Theory Tech, 1979, 27(12):987 doi: 10.1109/TMTT.1979.1129778
[3]
Ludwig R, Bretchko P. RF circuit design:theory and applications. Upper Saddle River:Prentice-Hall, 2000 http://ci.nii.ac.jp/ncid/BA48143667
[4]
Aaen P, Pla J, Bridges D, et al. A wideband method for the rigorous low-impedance loadpull measurement of high-power transistors suitable for large-signal model validation. ARFTG Conference Digest-Fall, 2000, 38:1 http://ieeexplore.ieee.org/document/4120134/?reload=true&arnumber=4120134&contentType=Conference%20Publications
[5]
Bouny J J. Impedance measurements for high power RF transistors using the TRL method. Microwave Journal, 1999, 42(10):126
[6]
Aboush Z, Jones C, Knight G, et al. High power active harmonic load-pull system for characterization of high power 100-watt transistors. Microwave Conference, 2005, 1:4 http://ieeexplore.ieee.org/document/1608930/keywords
[7]
Pozar D M. Microwave engineering. 3rd ed. New York: John Wiley & Sons, 2005
[8]
Klopfenstein R W. A transmission line taper of improved design. Proc IRE, 1956, 44(1):31 doi: 10.1109/JRPROC.1956.274847
[9]
Shih C. Advanced TRL (through-reflect-line) fixture design and error analyses for RF high power transistor characterization and automatic load pull measurement. ARFTG Conference Digest-Spring, 1998, 33:72 http://ieeexplore.ieee.org/document/4119969/keywords
Fig. 1.  Test fixture model.

Fig. 2.  Two ports network.

Fig. 3.  Schematic diagram of the reflection standard measurement.

Fig. 4.  Low impedance TRL test fixture.

Fig. 5.  Comparison between the measured $S_{22}$ results of the taper impedance and the simulation.

Fig. 6.  Calibration results of the thru standards.

Fig. 7.  Load-pull test results.

Table 1.   Impedances of the LDMOS transistor in the specified working conditions.

[1]
Ma R, Han G, Chen X, et al. Calibrating an arbitrary test fixture for a symmetric device by three measurements. IEEE Trans Instrumentation Measurement, 2010, 59(1):145 doi: 10.1109/TIM.2009.2022111
[2]
Engen G F, Hoer C A. Thru-reflect-line:an improved technique for calibrating the dual six-port automatic network analyzer. IEEE Trans Microw Theory Tech, 1979, 27(12):987 doi: 10.1109/TMTT.1979.1129778
[3]
Ludwig R, Bretchko P. RF circuit design:theory and applications. Upper Saddle River:Prentice-Hall, 2000 http://ci.nii.ac.jp/ncid/BA48143667
[4]
Aaen P, Pla J, Bridges D, et al. A wideband method for the rigorous low-impedance loadpull measurement of high-power transistors suitable for large-signal model validation. ARFTG Conference Digest-Fall, 2000, 38:1 http://ieeexplore.ieee.org/document/4120134/?reload=true&arnumber=4120134&contentType=Conference%20Publications
[5]
Bouny J J. Impedance measurements for high power RF transistors using the TRL method. Microwave Journal, 1999, 42(10):126
[6]
Aboush Z, Jones C, Knight G, et al. High power active harmonic load-pull system for characterization of high power 100-watt transistors. Microwave Conference, 2005, 1:4 http://ieeexplore.ieee.org/document/1608930/keywords
[7]
Pozar D M. Microwave engineering. 3rd ed. New York: John Wiley & Sons, 2005
[8]
Klopfenstein R W. A transmission line taper of improved design. Proc IRE, 1956, 44(1):31 doi: 10.1109/JRPROC.1956.274847
[9]
Shih C. Advanced TRL (through-reflect-line) fixture design and error analyses for RF high power transistor characterization and automatic load pull measurement. ARFTG Conference Digest-Spring, 1998, 33:72 http://ieeexplore.ieee.org/document/4119969/keywords
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    Received: 20 August 2012 Revised: 14 September 2012 Online: Published: 01 March 2013

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      Shuai Wang, Ke Li, Yibo Jiang, Mifang Cong, Huan Du, Zhengsheng Han. A thru-reflect-line calibration for measuring the characteristics of high power LDMOS transistors[J]. Journal of Semiconductors, 2013, 34(3): 034005. doi: 10.1088/1674-4926/34/3/034005 S Wang, K Li, Y B Jiang, M F Cong, H Du, Z S Han. A thru-reflect-line calibration for measuring the characteristics of high power LDMOS transistors[J]. J. Semicond., 2013, 34(3): 034005. doi: 10.1088/1674-4926/34/3/034005.Export: BibTex EndNote
      Citation:
      Shuai Wang, Ke Li, Yibo Jiang, Mifang Cong, Huan Du, Zhengsheng Han. A thru-reflect-line calibration for measuring the characteristics of high power LDMOS transistors[J]. Journal of Semiconductors, 2013, 34(3): 034005. doi: 10.1088/1674-4926/34/3/034005

      S Wang, K Li, Y B Jiang, M F Cong, H Du, Z S Han. A thru-reflect-line calibration for measuring the characteristics of high power LDMOS transistors[J]. J. Semicond., 2013, 34(3): 034005. doi: 10.1088/1674-4926/34/3/034005.
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      A thru-reflect-line calibration for measuring the characteristics of high power LDMOS transistors

      doi: 10.1088/1674-4926/34/3/034005
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      • Corresponding author: Han Zhengsheng, Email:zshan@ime.ac.cn
      • Received Date: 2012-08-20
      • Revised Date: 2012-09-14
      • Published Date: 2013-03-01

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