Fig. 1.
SEM photographs of the silicon MR resonator.
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Xiaogang Tong, Jun Liu, Chenyang Xue. High-Q micro-ring resonators and grating couplers for silicon-on-insulator integrated photonic circuits[J]. Journal of Semiconductors, 2013, 34(8): 085006. doi: 10.1088/1674-4926/34/8/085006
X G Tong, J Liu, C Y Xue. High-Q micro-ring resonators and grating couplers for silicon-on-insulator integrated photonic circuits[J]. J. Semicond., 2013, 34(8): 085006. doi: 10.1088/1674-4926/34/8/085006.
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High-Q micro-ring resonators and grating couplers for silicon-on-insulator integrated photonic circuits
doi: 10.1088/1674-4926/34/8/085006
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Abstract
An ultra-small integrated photonic circuit has been proposed, which incorporates a high-quality-factor passive micro-ring resonator (MR) linked to a vertical grating coupler on a standard silicon-on-insulator (SOI) substrate. The experimental results demonstrate that the MR propagation loss is 0.532 dB/cm with a 10 μm radius ring resonator, the intrinsic quality factor is as high as 202.000, the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm telecommunication wavelengths, and the measured fiber-to-fiber coupling loss is 10 dB. Furthermore, the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm/℃. Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications. -
References
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