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Research on CMOS Compatible Integrated Humidity Sensors

Peng Shaohua, Huang Qing’an, Qin Ming and Zhang Zhongping

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Abstract: A CMOS compatible integrated humidity sensor is designed and fabricated.The humidity sensor and CMOS circuits are fabricated at the same chip.The humidity sensor employs an interdigital finger structure and a polyimide sensing material.A humidity sensing model is given.Because of minor capacitance variation during the full range,switched-capacitor techniques are employed in measurement circuits.The principle of the circuits is discussed,and simulation results are presented accordingly.The design,implemented in a 3μm polysilicon-gate CMOS,results in a good DC output at 5~35℃ and a long time stability.

Key words: switched-capacitor circuitspolyimideCMOS compatible technologyhumidity sensor

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    Received: 20 August 2015 Revised: Online: Published: 01 February 2006

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      Peng Shaohua, Huang Qing’an, Qin Ming, Zhang Zhongping. Research on CMOS Compatible Integrated Humidity Sensors[J]. Journal of Semiconductors, 2006, In Press. Peng S H, Huang Q, Qin M, Zhang Z P. Research on CMOS Compatible Integrated Humidity Sensors[J]. Chin. J. Semicond., 2006, 27(2): 358.Export: BibTex EndNote
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      Peng Shaohua, Huang Qing’an, Qin Ming, Zhang Zhongping. Research on CMOS Compatible Integrated Humidity Sensors[J]. Journal of Semiconductors, 2006, In Press.

      Peng S H, Huang Q, Qin M, Zhang Z P. Research on CMOS Compatible Integrated Humidity Sensors[J]. Chin. J. Semicond., 2006, 27(2): 358.
      Export: BibTex EndNote

      Research on CMOS Compatible Integrated Humidity Sensors

      • Received Date: 2015-08-20

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