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Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction

Zhang Zuwei, Wen Zhiyu and Hu Jing

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Abstract: The design and simulation of a novel microoptoelectromechanical system (MOEMS) accelerometer based on Raman-Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers. The fundamental theories and principles of the device are discussed in detail, a 3D finite element simulation of the flexural plate wave delay line oscillator is provided, and the operation frequency around 40 MHz is calculated. Finally, a lecture experiment is performed to demonstrate the feasibility of the device. This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation, and has great potential for various applications.

Key words: accelerometer

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    Received: 20 August 2015 Revised: 12 December 2011 Online: Published: 01 April 2012

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      Zhang Zuwei, Wen Zhiyu, Hu Jing. Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction[J]. Journal of Semiconductors, 2012, 33(4): 044005. doi: 10.1088/1674-4926/33/4/044005 Zhang Z W, Wen Z Y, Hu J. Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction[J]. J. Semicond., 2012, 33(4): 044005. doi: 10.1088/1674-4926/33/4/044005.Export: BibTex EndNote
      Citation:
      Zhang Zuwei, Wen Zhiyu, Hu Jing. Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction[J]. Journal of Semiconductors, 2012, 33(4): 044005. doi: 10.1088/1674-4926/33/4/044005

      Zhang Z W, Wen Z Y, Hu J. Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction[J]. J. Semicond., 2012, 33(4): 044005. doi: 10.1088/1674-4926/33/4/044005.
      Export: BibTex EndNote

      Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction

      doi: 10.1088/1674-4926/33/4/044005
      • Received Date: 2015-08-20
      • Accepted Date: 2011-09-22
      • Revised Date: 2011-12-12
      • Published Date: 2012-03-23

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