| Citation: |
Wang Xiaoning, Yang Zhenchuan, Yan Guizhen. A Sacrificial Layer Etching Method Applied in Surface Micromachining Using Agitated BHF and Glycerol Solution[J]. Journal of Semiconductors, 2008, In Press.
Wang X N, Yang Z C, Yan G Z. A Sacrificial Layer Etching Method Applied in Surface Micromachining Using Agitated BHF and Glycerol Solution[J]. J. Semicond., 2008, 29(11): 2175.
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A Sacrificial Layer Etching Method Applied in Surface Micromachining Using Agitated BHF and Glycerol Solution
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Abstract
A modified buffered-HF solution with NH4F∶glycerol∶HF (4∶2∶1) is studied.With the implementation of a heating and agitating mechanism,this method is applied in a sacrificial layer etching scheme that increases the selectivity between silicon dioxide and aluminum.The etching rates of SiO2 and Al as a function of solution temperature are determined.Moreover,the effects of adding glycerol and agitating the etchant are examined and compared with this method.Finally,this method is tested on an actual device,and its efficiency is scrutinized.-
Keywords:
- surface micromachining,
- sacrificial etching,
- BHF,
- glycerol
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References
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