Chin. J. Semicond. > 2006, Volume 27 > Issue 2 > 354-357

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An ADI Method for the Breakdown Voltage Analysis of Thin-Film SOI RESURF Structure with the High-Order Compact Finite Difference

Yu Zongguang, Liu Zhan, Wang Guozhang and Xu Ziming

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Abstract: The application of ADI and high-order compact finite difference method to the breakdown voltage analysis of thin film SOI RESURF structure.Numerical results present that this method can decrease the number of iterative by 40% and reduce the computation time greatly.

Key words: ADIhigh-order compact finite differenceSOI RESURF breakdown voltage

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    Received: 20 August 2015 Revised: Online: Published: 01 February 2006

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      Yu Zongguang, Liu Zhan, Wang Guozhang, Xu Ziming. An ADI Method for the Breakdown Voltage Analysis of Thin-Film SOI RESURF Structure with the High-Order Compact Finite Difference[J]. Journal of Semiconductors, 2006, In Press. Yu Z G, Liu Z, Wang G Z, Xu Z M. An ADI Method for the Breakdown Voltage Analysis of Thin-Film SOI RESURF Structure with the High-Order Compact Finite Difference[J]. Chin. J. Semicond., 2006, 27(2): 354.Export: BibTex EndNote
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      Yu Zongguang, Liu Zhan, Wang Guozhang, Xu Ziming. An ADI Method for the Breakdown Voltage Analysis of Thin-Film SOI RESURF Structure with the High-Order Compact Finite Difference[J]. Journal of Semiconductors, 2006, In Press.

      Yu Z G, Liu Z, Wang G Z, Xu Z M. An ADI Method for the Breakdown Voltage Analysis of Thin-Film SOI RESURF Structure with the High-Order Compact Finite Difference[J]. Chin. J. Semicond., 2006, 27(2): 354.
      Export: BibTex EndNote

      An ADI Method for the Breakdown Voltage Analysis of Thin-Film SOI RESURF Structure with the High-Order Compact Finite Difference

      • Received Date: 2015-08-20

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