Chin. J. Semicond. > 2005, Volume 26 > Issue 4 > 840-845

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新型多晶硅薄膜热膨胀系数在线测试结构

张宇星 , 黄庆安 and 李伟华

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Key words: MEMS多晶硅热膨胀系数在线检测

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2005

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      • Received Date: 2015-08-19

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