| Citation: |
Li Li, Zhao Zhengping, Zhang Zhiguo, Guo Wensheng, Lü Miao, Yang Ruixia. Voltage Controlled Oscillator[J]. Journal of Semiconductors, 2006, In Press.
Li L, Zhao Z P, Zhang Z G, Guo W S, Lü M, Yang R X. Voltage Controlled Oscillator[J]. Chin. J. Semicond., 2006, 27(5): 900.
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Voltage Controlled Oscillator
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Abstract
A 2GHz LC VCO is fabricated using a micromachined variable capacitor for frequency tuning.The MEMS variable capacitors,whose controlling plates and capacitor plates are separated,are fabricated in a surface micromachining process.These devices have a quality factor of 38.462 at 2GHz.The MEMS VCO operating at 2.007GHz achieves a single side band phase-noise of -107.5dBc/Hz at a 100kHz offset from the carrier and an output power of -13.67dBm.On the basis of analysis of VCO mechanical-thermal noise produced from the micromachined variable capacitor,a method for lowering the phase noise by reducing the squeeze damping is proposed and an optimized number of damping holes is obtained.-
Keywords:
- MEMS,
- variable capacitor,
- quality factor,
- VCO,
- phase noise
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References
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Proportional views
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