| Citation: |
Ming Anjie, Li Tie, Zhou Ping, Wang Yuelin. An Electrostatic MEMS Actuator with Large Displacement Under Low Driving Voltage[J]. Journal of Semiconductors, 2008, In Press.
Ming A J, Li T, Zhou P, Wang Y L. An Electrostatic MEMS Actuator with Large Displacement Under Low Driving Voltage[J]. J. Semicond., 2008, 29(9): 1703.
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An Electrostatic MEMS Actuator with Large Displacement Under Low Driving Voltage
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Abstract
A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed.Side stability is analyzed to improve the performance of the actuator.According to the analysis,a comb-drive actuator with small comb gap,high-stiffness-ratio prebent suspension beams,non-initial overlap,and linear-engaged-length comb teeth is proposed and the parameters of the actuator are derived.Experiments indicate that the actuator resonates at 573Hz with a Q factor of 35.88 and reaches a maximum displacement of over 100μm at a driving voltage of 71V,which fulfills the design requirements and matches the analytical value to within 2.1%.-
Keywords:
- comb-drive actuator,
- side stability,
- MEMS
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References
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