| Citation: |
Chen Shaowu, Yu Jinzhong, Liu Jingwei, Wang Zhangtao, Xia Jinsong, Fan Zhongchao. Silicon-on-Insulator Based Optical Waveguide and Integrated Switch Matrix[J]. Journal of Semiconductors, 2005, In Press.
Chen S W, Yu J Z, Liu J W, Wang Z T, Xia J S, Fan Z C. Silicon-on-Insulator Based Optical Waveguide and Integrated Switch Matrix[J]. Chin. J. Semicond., 2005, 26(13): 212.
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Silicon-on-Insulator Based Optical Waveguide and Integrated Switch Matrix
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Abstract
Recent research progress on SOI based optical waveguide and integrated switch matrix is presented.The large cross-section single-mode trapezoidal rib waveguide,the MMI coupler,the 2×2 switch element are fabricated.The switch shows a much quicker response speed of 8μs (rise time)/5μs (fall time) and a very low power consumption of 140mW,which is the best result among all the reported silicon-based thermo-optic waveguide switches.Based on this,a 4×4 switch matrix is initially demonstrated -
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