Chin. J. Semicond. > 2004, Volume 25 > Issue 7 > 847-851

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非制冷热释电薄膜红外探测器热绝缘结构的研制

李靓 , 姚熹 and 张良莹

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Key words: 热释电薄膜红外探测器, 热绝缘结构, 溶胶凝胶法, 多孔SiO2薄膜, 过渡SiO2薄膜

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    Received: 19 August 2015 Revised: Online: Published: 01 July 2004

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      • Received Date: 2015-08-19

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